The Transactions of The Korean Institute of Electrical Engineers (전기학회논문지)

The Korean Institute of Electrical Engineers (대한전기학회)
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A Study on Metal Oxide based Humidity Sensor with Excellent Humidity Sensing Characteristics

감습특성이 우수한 금속산화물계 습도센서 연구

  • Published : 2009.10.01
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Abstract

$TiO_2$ films are fabricated using silk printing method. Heat treatment temperature of films is 600[$^{\circ}C$]. From the analysis of microstructure, grain size of $TiO_2$ films is about $0.2{\sim}0.3[{\mu}m]$. Thickness of films is 30.19[${\mu}m$] and surface uniformity of films is good. From the analysis of crystalline structure, $TiO_2$ films transform anatase phase to rutile phase. Capacitance of films increases according to increase relative humidity and decrease measuring frequency. Hysteresis characteristics of capacitance and impedance are best at 45[%RH] and 75[%RH] respectively. Impedance of films increases according to decrease measuring frequency.

Keywords

References

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