Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Design of The Micro Fluidic Heat Flux Sensor

유동형 미세 열유속 센서의 설계

  • Kim, Jung-Kyun (Department of Mechatronics, Gwangju Institute of Science and Technology) ;
  • Cho, Sung-Cheon (Department of Mechatronics, Gwangju Institute of Science and Technology) ;
  • Lee, Sun-Kyu (Department of Mechatronics, Gwangju Institute of Science and Technology)
  • 김정균 (광주과학기술원 기전공학과) ;
  • 조성천 (광주과학기술원 기전공학과) ;
  • 이선규 (광주과학기술원 기전공학과)
  • Published : 2009.11.01
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Abstract

A suspended membrane micro fluidic heat flux sensor that is able to measure the heat flow rate was designed and fabricated by a complementary-metal-oxide-semiconductor-compatible process. The combination of a thirty-junction gold and nickel thermoelectric sensor with an ultralow noise preamplifier, low pass filter, and lock-in amp has enabled the resolution of 50 nW power and provides the sensitivity of $11.4\;mV/{\mu}W$. The heater modulation method was used to eliminate low frequency noises from sensor output. It is measured with various heat flux fluid of DI-water to test as micro fluidic application. In order to estimate the heat generation of samples from the output measurement of a micro fluidic heat-flux sensor, a methodology for modeling and simulating electro-thermal behavior in the micro fluidic heat-flux sensor with integrated electronic circuit is presented and validated. The electro-thermal model was constructed by using system dynamics, particularly the bond graph. The electro-thermal system model in which the thermal and the electrical domain are coupled expresses the heat generation of samples converts thermal input to electrical output. The proposed electro-thermal system model shows good agreement with measured output voltage response in transient state and steady-state.

Keywords

References

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