Transactions of the Korean Society of Mechanical Engineers A (대한기계학회논문집A)

The Korean Society of Mechanical Engineers (대한기계학회)
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Measuring the Tensile Properties of the Nanostructure Using a Force Sensor

힘센서를 이용한 나노구조체의 인장물성 측정

  • Published : 2010.02.01
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Abstract

It is important to measure the mechanical properties of nanostructures because they are required to determine the lifetime and reliability of nanodevices developed for various fields. In this study, tensile tests for a multi-walled carbon nanotube (MWCNT) and a ZnO nanorod were performed in a scanning electron microscope (SEM). The force sensor was a cantilever type and was mounted in front of a nanomanipulator placed in the chamber. The nanomanipulator was controlled using a joystick and personal computer. The nanostructures dispersed on the cut area of a transmission electron microscope (TEM) grid were gripped with the force sensor by exposing an electron beam in the SEM; the tensile tests were the performed. The in situ tensile loads of the nanostructure were obtained. After the tensile test, the cross-sectional areas of the nanostructures were observed by TEM and SEM. Based on the TEM and SEM results, the elastic modulus of the MWCNT and ZnO nanorod were calculated to be 0.98 TPa and 55.85 GPa, respectively.

다양한 분야에 활용이 가능한 나노소자의 개발과 나노소자의 수명 및 신뢰성을 결정하기 위해서 나노구조체의 역학물성 측정은 중요하다. 본 연구에서는 다중벽탄소나노튜브(MWCNT)와 산화아연나노막대(ZnO nanorod)의 인장시험을 전자주사현미경(SEM) 내부에서 수행하였다. 챔버내부에 구축된 나노조작기 앞에 힘센서가 장착되었고, 나노조작기는 조이스틱과 컴퓨터로 제어 가능하도록 설계되었다. 반으로 자른 투과전자현미경(TEM)그리드 위에 분산된 나노구조체는 전자주사를 통하여 힘센서와 고정된 후 인장시험이 수행되었다. 인장시험 후 TEM과 SEM을 통하여 파단면을 측정하였고 MWCNT와 ZnO nanorod의 탄성계수는 0.98TPa, 55.85GPa로 각각 측정되었다.

Keywords

References

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