The characteristics of ZnO Thin film on PES substrate by pulsed laser deposition

펄스레이저 증착법에 의한 polyethersulfone 기판상의 ZnO박막의 특성

  • 최영진 (인하대 전기공학과) ;
  • 이천 (인하대 전기공학과)
  • Published : 2010.01.01


In this study, ZnO films have been grown on PES(polyethersu]fone) substrate by PLD(pulsed laser deposition) and characterized as a change of laser density and substrate temperature. Growing conditions were changed with substrate temperatures ranging from 50 to $200^{\circ}C$ and laser densities ranging from $0.2\sim0.4 J/cm^2$. Optical and structural properties were measured by XRD, SEM, AFM, PL measurement.



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