Journal of the Korean Society of Manufacturing Process Engineers (한국기계가공학회지)

The Korean Society of Manufacturing Process Engineers (한국기계가공학회)
권호 표지

Deformation analysis of Tool and Tool holder for Micromachining by FEM

FEM을 이용한 Micromachining용 Tool 및 Tool holder의 변형해석

  • 민경탁 (인천대학교 기계공학과) ;
  • 장호수 (인천대학교 기계공학과 대학원)
  • Received : 2009.10.14
  • Accepted : 2010.01.19
  • Published : 2010.02.28
Download PDF
⟨ Previous Next ⟩

Abstract

Micromachining technology using a ultra-precision micromachining system is widely applied in the fields of optics, biotechnology and analytical chemistry, etc. specially in microfabrication of fresnel lens, light guide panels of TFT-LED and PDP ribs with micro-patterns, machining errors have an effect on the performance of those products. The deflection of tool and tool holder is known to be one of the very important factors that is due to machining errors in micromachining. The deflections of diamond tool and tool holder used in micro-grooving are analysed by FEM. We analysed by FEM. With an linearity valuation of FEM, deflection of tool and tool holder is calculated by using the data of cutting force which is acquired from micro-V groove machining experiments in micromachining system.

Keywords

References

  1. M. J. Madou, "Fundamentals in Micro fabrication", CRC press, 1997.
  2. A. Manz and H. Becker, "Microsystem Technology in Chemestry and Life Science", Springer, 1998.
  3. J. G. Kim, T. J. Ko, H. S. Kim, J. W. Jeong, "Research on Machinability in Micro Turning," Conference of the Korean Society of Manufacturing Process Engineers, pp. 177-180, 2004.
  4. Tae-Jin Je, Kang-Won Lee, Sang-Cheon Park, Doo-Sun Choi, Kyung-Hyun Whang, "A study on machining technology of double angled micro pattern", Conference of the Korean Society of Manufacturing Process Engineers, pp.160-163, 2007.
  5. Tae-Jin Je, Kang-Won Lee, Sang-Cheon Park, Doo-Sun Choi, Eung-Suk Lee, Kyung-Hyun Whang, Jong-Chan Lee, "A study on effect of tool relief angle on machining micro V groove waved pattern", Conference of the Korean Society of Manufacturing Process Engineers, pp. 27-30, 2007.
  6. D. S. Park, T. I. Seo, M. W. Cho, E. S. Lee, G. H. Kim, D. S. Choi, T. J. Je, "Tool Deflection and Chip Formation in Micro V Grooving by Single Crystal Diamond Tools", ICMT 2005, Paper No. ICMT-193, 2005
  7. T. Masuzawa, "State of the art of micromaching", Annals of CIRP, Vol. 49(2), pp. 473-488. https://doi.org/10.1016/S0007-8506(07)63451-9
  8. "Quarterly Magazine MICROMACHINE 1-12", Micromachine Center, Tokyo, 1995.
  9. J. Chae, S. S. Park, T. Freiheit, "Investi- gatioon of micro-cutting opertions," Int. Journal of Machine Tools & Manufacture Vol. 46, pp. 6313-33, 2006.
  10. X. Liu, R.E. DeVor, S.G. Kapoor, K.F. Ehman, 'The mechanics of machining at the micro scale: assessment of the current state of the science", Journal of Manufacturing Science and Engineering Vol. 126, pp. 666-678, 2004. https://doi.org/10.1115/1.1813469