Korean Journal of Air-Conditioning and Refrigeration Engineering (설비공학논문집)

The Society of Air-Conditioning and Refrigerating Engineers of Korea (대한설비공학회)
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An Experimental Study on Semiconductor Process Chiller for Dual Channel

듀얼채널을 적용한 반도체공정용 칠러의 실험적 연구

  • Cha, Dong-An (Energy System Technology Center, Korea Institute of Industrial Technology) ;
  • Kwon, Oh-Kyung (Energy System Technology Center, Korea Institute of Industrial Technology)
  • 차동안 (한국생산기술연구원 에너지설비센터) ;
  • 권오경 (한국생산기술연구원 에너지설비센터)
  • Received : 2010.06.18
  • Published : 2010.11.10
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Abstract

Excessive heat occurs during semiconductor manufacturing process. Thus, precise control of temperature is required to maintain constant chamber-temperature and also wafer-temperature in the chamber. Compared to an industrial chiller, semiconductor chiller's power consumption is very high due to its continuous operation for a year. Considering the high power consumption, it is necessary to develop an energy efficient chiller by optimizing operation control. Therefore, in this study, a semiconductor chiller is experimentally investigated to suggest energy-saving direction by conducting load change, temperature rise and fall and control precision experiments. The experimental study shows the cooling capacity of dual-channel chiller rises over 30% comparing to the conventional chiller. The time and power consumption in the temperature rising experiment are 43 minutes and 8.4 kWh, respectively. The control precision is the same as ${\pm}1^{\circ}C$ at $0^{\circ}C$ in any cases. However, it appears that the dual channel's control precision improves to ${\pm}0.5^{\circ}C$ when the setting temperature is over $30^{\circ}C$.

Keywords

References

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