Journal of the Korean Crystal Growth and Crystal Technology (한국결정성장학회지)

The Korea Association of Crystal Growth (한국결정성장학회)
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Fabrication and properties of Calcium-aluminate electride thin films using by sol-gel process

Sol-Gel 법을 이용한 칼슘-알루미네이트계 전자화물 박막의 제조와 특성

  • Kim, K.H. (Korea Institute of Ceramic Engineering and Technology) ;
  • Park, J.S. (Korea Institute of Ceramic Engineering and Technology) ;
  • Chae, J.H. (Korea Institute of Ceramic Engineering and Technology) ;
  • Seo, W.S. (Korea Institute of Ceramic Engineering and Technology) ;
  • So, S.M. (Korea Institute of Ceramic Engineering and Technology) ;
  • Kim, T.K. (Korea Institute of Ceramic Engineering and Technology) ;
  • Kim, H.S. (Korea Institute of Ceramic Engineering and Technology) ;
  • Lee, B.H. (Department of Materials and Engineering, Myongji University)
  • 김경훈 (한국세라믹기술원 기업지원본부) ;
  • 박주석 (한국세라믹기술원 기업지원본부) ;
  • 채재홍 (한국세라믹기술원 기업지원본부) ;
  • 서원선 (한국세라믹기술원 기업지원본부) ;
  • 소성민 (한국세라믹기술원 기업지원본부) ;
  • 김태관 (한국세라믹기술원 기업지원본부) ;
  • 김형순 (한국세라믹기술원 기업지원본부) ;
  • 이병하 (명지대학교 신소재공학부)
  • Received : 2010.10.20
  • Accepted : 2010.12.10
  • Published : 2010.12.31
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Abstract

The Calcium-aluminate electride thin films on the quartz substrates was coated by sol-gel process. The crystallization of the C12A7 thin film was observed at $800^{\circ}C$ and high density C12A7 thin film was achieved on heat treatment at $1,200^{\circ}C$ for 1 hour. The reduction heat treatment of C12A7 thin film could be converted from insulator to conductor and the electrical conductivity was 120 S/cm in the C12A7 thin film heat treated at $1,200^{\circ}C$ with $H_2$ gas for 48 hours.

Sol-gel법을 적용하여 $12CaO{\cdot}7Al_2O_3$(C12A7) 전자화물 박막을 제조하기 위해 CaO-$Al_2O_3$ sol을 제조하여 dip 코팅법을 적용하여 quartz 기판에 박막을 형성하였으며 열처리를 통해 C12A7의 박막을 제조하였다. C12A7 상의 형성 $800^{\circ}C$에서 시작되었고 $1,200^{\circ}C$ 온도에서 1시간 열처리를 통해 치밀화된 박막을 제조할 수 있었다. 제조된 C12A7 박막은 부도체였지만 수소 환원 분위기 열처리를 통해 전기전도도를 나타내기 시작했으며 $1,200^{\circ}C$ 48시간 열처리 시 120 S/cm의 전기전도도를 나타내었다.

Keywords

References

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