Journal of the Korean Institute of Illuminating and Electrical Installation Engineers (조명전기설비학회논문지)

The Korean Institute of IIIuminating and Electrical Installation Engineers (한국조명전기설비학회)
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Development of Performance Evaluation System for the High Speed EFEM

고속 EFEM의 성능평가시스템 개발

  • Received : 2009.09.15
  • Accepted : 2009.09.30
  • Published : 2010.02.28
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Abstract

This paper suggests the new performance evaluation system which is suitable for high speed EFEM(Equipment Front End Module) device using a semiconductor process. An EFEM consisting of multi-joint robots is the mainstay of semiconductor automation, shuffling silicon wafers or quartz photo-masks between ultra-clean storage carriers and a variety of processing, measurement and testing systems. The theoretical and experimental studies for the development of performance evaluation system have been carried out. The presented results from the above investigation show considerably developed performance evaluation system for the high speed EFEM Especially, it is efficient for prepareing the WTO/TBT(Technical Barriers to Trade) Agreement and the PL(Product Liability) law.

본 논문은 반도체 공정에 사용되는 고속 EFEM(Equipment Front End Module) 장치의 새로운 성능평가시스템을 제안한다. 다관절 로봇으로 구성된 EFEM은 실리콘 웨이퍼 또는 포토마스크를 클린 스토리지 캐리어와 각종 계측 및 테스팅 시스템 사이를 이동시키는 반도체 자동화의 핵심장치이다. 성능평가 시스템 개발을 위한 이론과 실험적인 연구가 수행되었고, 그 결과는 고속 EFEM 장치의 성능 평가시스템이 적합함을 입증한다. 특히, WTO/TBT(Technical Barhers to Trade) 협정 및 PL(Product Liability)법에 대처하는데 매우 효과적이다.

Keywords

References

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