Korean Journal of Materials Research (한국재료학회지)

Materials Research Society of Korea (한국재료학회)
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CO Gas Sensing Characteristics of Nanostructured ZnO Thin Films

산화아연 나노구조 박막의 일산화탄소 가스 감지 특성

  • Hung, Nguyen Le (Department of Materials Science and Engineering, Chungnam National University) ;
  • Kim, Hyo-Jin (Department of Materials Science and Engineering, Chungnam National University) ;
  • Kim, Do-Jin (Department of Materials Science and Engineering, Chungnam National University)
  • 웬래훙 (충남대학교 공과대학 재료공학과) ;
  • 김효진 (충남대학교 공과대학 재료공학과) ;
  • 김도진 (충남대학교 공과대학 재료공학과)
  • Received : 2010.04.19
  • Accepted : 2010.05.07
  • Published : 2010.05.25
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Abstract

We investigated the carbon monoxide (CO) gas-sensing properties of nanostructured Al-doped zinc oxide thin films deposited on self-assembled Au nanodots (ZnO/Au thin films). The Al-doped ZnO thin film was deposited onto the structure by rf sputtering, resulting in a gas-sensing element comprising a ZnO-based active layer with an embedded Pt/Ti electrode covered by the self-assembled Au nanodots. Prior to the growth of the active ZnO layer, the Au nanodots were formed via annealing a thin Au layer with a thickness of 2 nm at a moderate temperature of $500^{\circ}C$. It was found that the ZnO/Au nanostructured thin film gas sensors showed a high maximum sensitivity to CO gas at $250^{\circ}C$ and a low CO detection limit of 5 ppm in dry air. Furthermore, the ZnO/Au thin film CO gas sensors exhibited fast response and recovery behaviors. The observed excellent CO gas-sensing properties of the nanostructured ZnO/Au thin films can be ascribed to the Au nanodots, acting as both a nucleation layer for the formation of the ZnO nanostructure and a catalyst in the CO surface reaction. These results suggest that the ZnO thin films deposited on self-assembled Au nanodots are promising for practical high-performance CO gas sensors.

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