Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Optimization of a capacitive sensor for high dynamic range

높은 동적영역을 갖기 위한 정전용량형 센서의 최적화

  • 강대실 (POSTECH 음향진동 트랜스듀서 실험실) ;
  • 김무진 (삼성전자) ;
  • 문원규 (POSTECH 음향진동 트랜스듀서 실험실)
  • Received : 2009.11.16
  • Accepted : 2010.03.05
  • Published : 2010.03.31
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Abstract

The capacitive sensor has a simple structure, compact size and low cost, but a small dynamic range. The small range is caused by use of gap variation. If the sensor takes area variation type with one plate moving horizontally, it can have a large measurable range. While the area variation has relatively low sensitivity, some studies have found methods to improve the sensitivity. Even though the methods are effective, parameters of the results are limited and 2 dimensional. This study provides more practical and 3 dimensional analysis and suggests relations between parameters. Using the results, the optimized design parameters of a high dynamic range capacitive sensor can be found.

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