Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Fabrication and characterization of fine pitch IR image sensor using a-Si

비정질 실리콘을 이용한 미세 피치 적외선 이미지 센서 제조 및 특성

  • Received : 2010.01.11
  • Accepted : 2010.03.15
  • Published : 2010.03.31
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Abstract

The microbolometer array sensor with fine pitch pixel array has been implemented to the released amorphous silicon layer supported by two contact pads. For the design of focal plane mirror with geometrical flatness, the simple beam test structures were fabricated and characterized. As the beam length decreased, the effect of beam width on the bending was minimized, Mirror deformation of focal plane in a real pixel showed downward curvature by residual stress of a-Si and Ti layer. The mirror tilting was caused by the mis-align effect of contact pad and confirmed by FEA simulation results. The properties of bolometer have been measured as such that the NETD 145 mK, the TCR -2 %/K, and thermal time constant 1.99 ms.

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References

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Cited by

  1. SPICE-Compatible Modeling of a Microbolometer Package Including Thermoelectric Cooler vol.22, pp.1, 2013, https://doi.org/10.5369/JSST.2013.22.1.44