References
- S. R. Anton and H. A. Sodano, “A review of power harvesting using piezoelectric materials (2003-2006)”, Smart Mater. Struct., vol. 16, pp. R1-R21, 2007. https://doi.org/10.1088/0964-1726/16/3/R01
- S. P. Beeby, M. J. Tudor, and N. M. White, “Energy harvesting vibration sources for microsystems applications”, Meas. Sci. Technol., vol. 17, pp. R175-R195, 2006. https://doi.org/10.1088/0957-0233/17/12/R01
- K. A. Cook-chennault, N. Thambi, M. A. Bitetto, and E. B. Hameyie, “Piezoelectric energy harvesting: A green and clean alternative for sustained power production”, Bull. Sci. Technol. Soc., vol. 28, pp. 496-509, 2008. https://doi.org/10.1177/0270467608325374
- J. Olivares, E. Iborra, M. Clement, L. Vergara, J. Sangrador, and A. Sanz-Hervas, “Piezoelectric actuation of microbridges using AlN”, Sens. & Actu. A, vol. 123, pp. 590-595, 2005. https://doi.org/10.1016/j.sna.2005.03.066
- K. Tonisch, V. Cimalla, Ch. Foerster, H. Romanus, O. Ambacher, and D. Dontsov, “Piezoelectric properties of polycrystalline AlN thin film for MEMS application”, Sens. & Actu. A, vol. 132, pp. 658-663, 2006. https://doi.org/10.1016/j.sna.2006.03.001
- K. M. Chang, R. J. Lin, and I. C. Deng, “Design of low-temperature CMOS-process compatible membrane fabricated with sacrificial aluminum layer for thermally isolated applications”, Sens. & Actu. A, vol. 134, pp. 660-667, 2007. https://doi.org/10.1016/j.sna.2006.02.053
- J. B. Lee, J. P. Jung, M. H. Lee, and J. S. Park, “Effects of bottom electrodes on the orientation of AlN films and the frequency responses of resonators in AlN-based FBARs”, Thin Solid Films, vol. 447, pp. 610-614, 2004. https://doi.org/10.1016/j.tsf.2003.07.023
- W. J. Wu, A. M. Wickenheiser, T. Reissman, and E. Garcia, “Modeling and experimental verification of synchronized discharging techniques for boosting power harvesting from piezoelectric transducers”, Smart Mater. Struct., vol. 18, pp. 055012 (1)-055012(14), 2009.
- K. Kano, K. Arakawa, Y. Takeuchi, M. Akiyama, N. Ueno, and N. Kawahara, “Temperature dependence of piezoelectric properties of sputtered AlN on silicon substrate”, Sens. & Actu. A, vol. 130, pp. 397-402, 2006. https://doi.org/10.1016/j.sna.2005.12.047
- D. Shen, J. H. Park, J. Ajitsaria, S. Y. Choe, H. C. Wikle, and D. J. Kim, “The design, fabrication and evaluation of a MEMS PZT cantilever with an integrated Si proof mass for vibration energy harvesting”, J. Micromech. Microeng., vol. 18, pp. 055017(1)-055017(7), 2008.
Cited by
- Application and Verification of Fully-Integrated Design Environment for Piezoelectric Energy Harvester vol.22, pp.5, 2013, https://doi.org/10.5369/JSST.2013.22.5.364