Journal of the Korean Society of Radiology (한국방사선학회논문지)

The Korean Society of Radiology (한국방사선학회)
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Design and Fabrication of Hard X-ray Zone Plate

경 엑스선 존 플레이트(Zone Plate) 설계 및 제작

  • Chon, Kwon-Su (Department of Radiological Science, Catholic University of Daegu)
  • 천권수 (대구가톨릭대학교 방사선학과)
  • Received : 2010.05.20
  • Accepted : 2010.09.14
  • Published : 2010.09.30
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Abstract

Spatial resolution is determined by the performance of x-ray optics used in the x-ray imaging system. A zone plate was designed for obtaining a high spatial resolution image at x-ray energy of 8.5keV. A spatial resolution of 80 nm was estimated by the ray tracing when an x-ray tube of tungsten targe was used instead of synchrotron radiation. The designed zone plate of outermost zone width of 40nm was successfully fabricated by the electron-beam lithography.

엑스선 영상의 공간분해능은 영상획득 장치에 사용되는 광학소자의 성능에 의해 결정된다. 8.5keV에서 높은 공간분해능 달성이 가능한 존 플레이트를 설계하였다. 방사광을 이용하는 대신 엑스선 튜브를 사용하는 영상시스템에서는 80nm의 공간분해능을 달성할 수 있음을 광선추적 기법을 이용하여 예측하였다. 전자빔 석판인쇄술을 이용하여 최외곽 폭 40nm를 갖는 존 플레이트가 제작하였다.

Keywords

References

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