Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Study on the Air-bearing Stage Driven by Linear Induction Motors

선형 유도기 구동 방식 공기 베어링 스테이지에 관한 연구

  • Jung, Kwang-Suk (Department of Mechanical Engineering, Chungju National Univ.) ;
  • Shim, Ki-Bon (Graduate School, Department of Mechanical Engineering, Chungju National Univ.)
  • 정광석 (충주대학교 기계공학과) ;
  • 심기본 (충주대학교 기계공학과 대학원)
  • Received : 2010.02.03
  • Accepted : 2010.04.17
  • Published : 2010.06.01
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Abstract

Linear induction motor is adopted as an actuator of the planar stage. An inherently poor characteristic at zero or ultra-low speed zone of the induction motor is remarkably improved due to a recent development of power electronic semiconductor technology and a spatial vector control theory. At present, a servo response speed of the induction motor reaches 90 percent of one of PM synchronous or BLDC motor. Specially, as a secondary of the induction motor can be constructed using uniform conducting sheets, there is no periodic force ripple as in PM motors. So, the induction motor can be superior to another driving means under a certain condition. This paper discusses the overall development procedure of non-contact planar stage with a big workspace using linear induction motors.

Keywords

References

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