반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

미세 팁 기판 위에 전기영동법으로 성장시킨 탄소 나노튜브의 전계방출 특성

Field emission properties of carbon nanotubes grown on micro-tip substrates using an electrophoretic deposition method

  • 장한빛 (한양대학교 전자전기제어계측공학과) ;
  • 노영록 (한양대학교 전자전기제어계측공학과) ;
  • 김종필 (한양대학교 전자전기제어계측공학과) ;
  • 박진석 (한양대학교 전자전기제어계측공학과)
  • Chang, Han-Beet (Dept. of Electronic, Electrical, Control and Instrumentation Engineering, Hanyang University) ;
  • Noh, Young-Rok (Dept. of Electronic, Electrical, Control and Instrumentation Engineering, Hanyang University) ;
  • Kim, Jong-Pil (Dept. of Electronic, Electrical, Control and Instrumentation Engineering, Hanyang University) ;
  • Park, Jin-Seok (Dept. of Electronic, Electrical, Control and Instrumentation Engineering, Hanyang University)
  • 투고 : 2010.10.25
  • 심사 : 2010.11.30
  • 발행 : 2010.12.31
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초록

Field-emission characteristics of carbon nanotubes(CNTs), which were grown on conical-type tungsten micro-tips by using an electrophoretic deposition(EPD) method, were examined. The EPD method proved to be convenient to manipulate and arrange CNTs from well dispersed suspensions onto such tip-type substrates. The growth rate of CNTs was proportional to the applied d.c. bias voltage and the process time. It was observed from the Raman study that the EPDproduced CNTs showed better crystal qualities with the Raman intensity ratio( $I_D$/$I_G$) of 0.41-0.42 than the CVD-produced CNTs and their crystal qualities could be further improved by thermal annealing. The electron emitters based on the EPDCNTs showed excellent field emission properties, such as the threshold voltage for electron emission of about 620 V and the maximum emission current of about 345 ${\mu}A$. In addition, the EPD-CNTs exhibited the stable long-term(up to 40 h) emission capability and the emission stability was enhanced by thermal annealing.

키워드

참고문헌

  1. H. Y. Jung, S. M. Jung, and J. S. Suh, Carbon, "Horizontally aligned single-walled carbon nanotube field emitters fabricated on vertically aligned multi-walled carbon nanotube electrode arrays," Vol.46, pp.1345, 2008 https://doi.org/10.1016/j.carbon.2008.05.020
  2. H. Sugie, M. Tanemura, V. Filip, K. Iwata, K. Takahashi, and F. Okuyama, "Carbon nanotubes as electron source in an x-ray tube," Appl. Phys. Lett., Vol.78, pp.2578, 2001 https://doi.org/10.1063/1.1367278
  3. K. Kawakita, K. Hata,a and H. Sato, "Development of microfocused x-ray source by using carbon nanotube field emitter," J. Vac. Sci. Technol. B, Vol.24, pp.950, 2006 https://doi.org/10.1116/1.2183785
  4. J. P. Kim, Y. K. Kim, C. K. Park, H. Y. Choi, J. U. Kim, and J. S. Park, "Direct growth of carbon nanotubes on a micro-sized cobalt tip and characterization of electron-emission properties," Thin Solid Films, Vol.517, pp.1136, 2008 https://doi.org/10.1016/j.tsf.2008.08.174
  5. D. Ferrer, T. Tanii, I. Matsuya, G. Zhong, S. Okamoto, and H. Kawarada, "Enhancement of field emission characteristics of tungsten emitters by single-walled carbon nanotube modification," Appl. Phys. Lett., Vol.88, pp.033116, 2006 https://doi.org/10.1063/1.2165205
  6. Y. Li, W. Kim, Y. Zhang, M. Rolandi, D. Wang, and H. Dai, "Growth of single-walled carbon nanotubes from discrete catalyst nanoparticles of various sizes," J. Phys. Chem. B, Vol.105, pp.11424, 2001 https://doi.org/10.1021/jp012085b
  7. W. Y. Sung, S. M. Lee, W. J. Kim, J. G. Ok, H. Y. Lee, and Y. H. Kim, "New approach to enhance adhesions between carbon nanotube emitters and substrate by the combination of electrophoresis and successive electroplating," Diamond Relat. Mater., Vol.17, pp.1003, 2008 https://doi.org/10.1016/j.diamond.2008.03.001
  8. H. Zhao, H. Song, Z. Li, G. Yuan, Y. Jin, "Electrophoretic deposition and field emission properties of patterned carbon nanotubes," Appl. Surf. Sci., Vol.251, pp.242, 2005 https://doi.org/10.1016/j.apsusc.2005.03.202
  9. S. I. Jung, S. H. Jo, H. S. Moon, J. M. Kim, D. S. Zang, C. J. Lee, "Improved crystallinity of double-walled carbon nanotubes after a high-temperature thermal annealing and their enhanced field emission properties," J. Phys. Chem. C, Vol.111, pp.4175, 2007 https://doi.org/10.1021/jp0676078
  10. M. Sveningsson, R. E. Morjan, O. A. Nerushev, Y. Sato, J. Backstrom, E. E. B. Campbell, and F. Rohmund, "Raman spectroscopy and field-emission properties of CVD-grown carbon-nanotube films," Appl. Phys. A: Materials Science and Processing, Vol.73/4, pp.409, 2001.
  11. C. K. Park, J. P. Kim, S. J. Yun, Y. K. Kim, W. Kim, J. W. Kim, J. S. Park, "Field-emission properties of carbon nanotubes grown on a submicron-sized tungsten tip in terms of various buffer layers," Diamond Relat. Mater., Vol.17, pp.1826, 2008 https://doi.org/10.1016/j.diamond.2008.01.105
  12. J. A. Sanchez, M. P. Menguc, R. R. Vallance, and K. F. Hii, "Heat transfer within carbon nanotubes during electron field emission," J. Thermophys. Heat. Tr., Vol.22, pp.281, 2008 https://doi.org/10.2514/1.34165
  13. Y. K. Kim, J. P. Kim, C. K. Park, S. J. Yun, W. Kim, S. Heu, J. S. Park, "Electron-emission properties of titanium carbide-coated carbon nanotubes grown on a nano-sized tungsten tip," Thin Solid Films, Vol.517, pp.1156, 2008 https://doi.org/10.1016/j.tsf.2008.08.168