한국생산제조학회지 (Journal of the Korean Society of Manufacturing Technology Engineers)

  • 제19권4호
  • /
  • Pages.476-484
  • /
  • 2010
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  • 2508-5093(pISSN)
  • /
  • 2508-5107(eISSN)
한국생산제조학회 (The Korean Society of Manufacturing Technology Engineers)
권호 표지

위치결정 스테이지 베이스 진동 모델링 및 저감기법 개발

Modeling and Countermeasure for Positioning Stage Base Vibration

  • 박아영 (금오공과대학교 대학원 기전공학과) ;
  • 임재곤 (금오공과대학교 대학원 기전공학과) ;
  • 홍성욱 (금오공과대학교 기계공학부)
  • 투고 : 2010.03.25
  • 심사 : 2010.07.28
  • 발행 : 2010.08.15
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초록

Precise positioning stages are often employed for precise machinery. For the purpose of vibration isolation, these precise positioning stages are mounted on a heavy base structure which is supported by compliant springs. Then the base structure is subjected to residual vibration due to the reactive force and vertical moving load induced by the stage motion. This paper investigates the vibration behavior of a positioning stage base and the associated vibration suppression technique. A dynamic model is developed to investigate the base vibration due to the reactive force and moving load effects by the moving stage. An input shaping technique is also developed to suppress the residual vibrations in base structures. Simulations and experiments show that the developed dynamic model adequately represents the base vibration and that the proposed input shaping technique effectively removes the residual vibrations from the positioning stage base.

키워드

참고문헌

  1. Jones, S. and Ulsoy, A. G., 1999, "An Approach to Control Input Shaping with Application to Coordinate Measuring Machines," Journal of Dynamic Systems, Measurement and Control, Vol. 121, 242-247. https://doi.org/10.1115/1.2802461
  2. Tseng, Y. T. and Liu, J. H., 2003, "High-speed and Precise Positioning and XY Table," Control Engineering Practice, Vol. 11, No.4, 357-365. https://doi.org/10.1016/S0967-0661(02)00109-0
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  5. Seo, Y. G., Jang, J. W., and Hong, S. W., 2009, "Residual Vibration Reduction of Precise Positioning Stage Using Virtual-Mode Based Input Shapers," Journal of KSMTE, Vol. 18, No.3, 255-260.
  6. Kim, H. K, Kwon, O. Y., Bae, G. H., and Hong, S. W., 2008, "Application of Input Shaping Method for Positioning Stage in Consideration of Base Structure Vibration," Proceedings of 2008 KSMTE Fall Conference, Anson, Republic of Korea, pp. 375-380.
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