The Transactions of The Korean Institute of Electrical Engineers (전기학회논문지)

The Korean Institute of Electrical Engineers (대한전기학회)
권호 표지
DOI QR코드

DOI QR Code

Design and Operating Characteristics of Cylindrical Linear Motor for Long Stroke Precision Stage

롱 스트로크 정밀 스테이지용 원통형 리니어모터의 설계 및 운전 특성

  • Received : 2010.10.12
  • Accepted : 2010.11.30
  • Published : 2011.01.01
Download PDF
⟨ Previous Next ⟩

Abstract

This paper presents the design and operating characteristics of the novel cylindrical linear motor which is designed for the long stroke XY stage. In the long stroke structure, the air gap is changed by the distortion and bending effects, and it makes additional position error in the XY stage. In order to consider the distortion and bending effects of the long stroke, the field part of the cylindrical linear motor is designed as an open structure, and the stroke is supported by the bridge guide which is positioned in the open field part. The mechanical bridge guide can reduce the bending effects of the stroke and can keep a constant air gap. The detailed design process of the proposed cylindrical linear motor is presented in this paper. The proposed motor is analyzed by the 3D FEM technology. The practical XY stage which uses the proposed motor is tested to verify the propose novel cylindrical linear motor. The FEM and experimental results show the effectiveness of the proposed motor.

Keywords

References

  1. 장석명, "리니어 모터 기술". 대한전기학회지 제48권, 제2호, pp. 4-8. 1999
  2. 고 임달호 박사 추모회 편저, "電磁에너지 변환기기의 해석과 응용", 한양대학교 출판원, 1997
  3. 産業用リニアモータの特性測定法と評価方法調査専門委 員会, "産業用リニアモータの特性測定法と評価方法" 日本電気学会技術報告 第1024号, pp. 22 2005
  4. 正田 英介, "リニアドライブ技術とその応用", オーム社, 1991
  5. 松原厚, "IMTS, JIMTOFにおける位置決め技術の動向", (日本)精密工学会超精密位置決め専門委員会定例会講演 前刷集, No.2006-5, pp.1-6, 2007
  6. 柴崎祐一, "半導体露光装置における配管レスステージの 実現", 機械設計, 50, 8, pp. 36-41, 2006
  7. 加山泰永, 牧野内進, "半導体露光装置のステージ技術", (日本)精密工学会 超精密位置決め専門委員会定例会講演 前刷集, No.2001-5，pp.1-8, 2001
  8. 冨田良幸, "住友重機械の精密ステージ技術について ー 製品紹介とリニアモータ駆動系の駆動特性―",(日本)精 密工学会超精密位置決め専門委員会定例会講演前刷集, No.2005-4, pp.37-46, 2005
  9. 金弘中, 中津川潤之介, 酒井慶次郎, 柴田均, "高加速度直 線駆動装置(トンネルアクチュエータ）", (日本)応用磁気学会誌, Vol. 29, No. 3, pp.199-204, 2005
  10. 金弘中, 佐藤海二, 高林博文, 大橋健, 渡辺利彦, "大推 力化・高加減速化を実現するリニアドライブ技術", 平成 18年電気学会産業応用部門大会講演論文集[III], No. 3-S10-1, pp. III-3-III-6, 2006
  11. Pierre-Emmanuel Cavarce, Hamid Ben Ahmed, and Bernard Multon : "New multi-Rod linear Actuator for Direct-Drive, Wide Mechanical Bandpass Applications", IEEE Trans. Ind. Applicat., Vol. 39, No.4, pp.961-970, JULY/AUGUST 2003 https://doi.org/10.1109/TIA.2003.813705
  12. Toru Shikayama, Ryuichi Oguro, Teruo Tsuji, "Thrust and Cogging Force Improvement on Inductor Linear Motor" IEEJ Trans IA, Vol. 123, No. 6, pp.746-753, 2003 https://doi.org/10.1541/ieejias.123.746

Cited by

  1. Simulation and Test Study on Direct Force Control for Permanent Magnet Linear Synchronous Motor vol.8, pp.3, 2013, https://doi.org/10.4304/jcp.8.3.733-740
  2. Modeling Analysis and Parameters Calculation of Permanent Magnet Linear Synchronous Motor vol.8, pp.2, 2013, https://doi.org/10.4304/jcp.8.2.463-470