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The Study of Transmittance and Conductivity in ZnO/Ag Multilayer Films

ZnO/Ag Multilayer의 투과율과 전도성에 관한 연구

  • Kim, Yun-Hae (Dept. of Mechanical and Materials Engineering, Korea Maritime University) ;
  • Kim, Do-Wan (Dept. of Mechanical and Materials Engineering, Korea Maritime University) ;
  • Murakami, Ri-Ichi (Dept. of Mechanical Engineering, The University of Tokushima) ;
  • Moon, Kyung-Man (Dept. of Mechanical and Materials Engineering, Korea Maritime University) ;
  • Lee, Sung-Yul (Dept. of Mechanical and Materials Engineering, Korea Maritime University)
  • Received : 2010.10.20
  • Accepted : 2011.02.16
  • Published : 2011.02.28

Abstract

This study has lowered the specific resistance by coating a thin film layer of Ag, playing the role of the electron donor on the ZnO that is used usefully for the transparent conductive oxides. Presently, this study has examined the transmittance and electric characteristics according to the thickness of the Ag thin film layer. Also, this study has observed the transmittance and electric characteristics according to the uppermost ZnO thin film layer of ZnO/Ag/ZnO symmetric film and has conducted the theoretical investigation. In order to observe the transmittance and electric characteristics according to the thickness of the Ag thin film layer and the uppermost ZnO thin film layer, this study conducted the film deposition at room temperature while making use of the DC magnetron sputtering system. In order to see the changes in the thickness of the Ag thin film layer, this study coated a thin film while increasing by 4nm; and, in order to see the changes in the thickness of uppermost ZnO thin film layer, it performed the thin film coating by increasing by 5nm. From the experimental result, the researchers observed that the best transmittance could be obtained when the thickness of the Ag thin film layer was 8nm, but the resistance and mobility increased as the thickness got larger. On the other hand, when the thickness of the uppermost ZnO thin film layer was 20nm, the experiment yielded the best transmittance with excellent electric characteristics. Also, when compared the ZnO/Ag asymmetric film with the ZnO/Ag/ZnO symmetric film, the ZnO/Ag asymmetric film showed better transmittance and electric characteristics.

Keywords

References

  1. 류상, 김영만 (2005). “R.F Sputtering으로 제조한 ZnO 박막의 미세구조와 광학적 특성에 미치는 잔류응력의 영향”, 한국표면공학회지, 제38권, 제4호, pp 144-149.
  2. 박성순, 임원택, 이창효 (1998). “ZnO 박막과 금속전극과의 계면특성조사”, 한국진공학회지, 제7권, 제3호, pp 201-207.
  3. 손영국, 황동현, 조신호 (2007). “산소유량비 변화에 따른 Al 도핑된 ZnO 박막의 구조 및 광학적 특성”, 한국진공학회지, 제16권, 제4호, pp 267-272.
  4. 임유승, 김상모, 손인환, 이원재, 최명규, 김경환 (2008). “FTS법으로 제작한 Ag/ZnO 박막의 전기적, 광학적 특성”, 한국진공학회지, 제17권, 제2호, pp 102-108. https://doi.org/10.5757/JKVS.2008.17.2.102
  5. 최병호, 이효근 (1991). ”RF Sputter 방법으로 제조한 ZnO : Ga 박막의 열처리 특성”, 한국연구재단, 기초과학연구사업 학술기사.
  6. David, F. (2009). ”LED Technology: Organic Displays Come of Age”, NaturePhotonics3, pp 453-455. https://doi.org/10.1038/nphoton.2009.132
  7. David, T., Goldsmith, S. and Boxman, R.L. (2004). ”Electrooptical and Structural Properties of Thin ZnO Films, Prepared by Filtered Vacuum arc Deposition”, Thin Solid Films, pp 61-67.
  8. Joseph, M.C., Hanno, H.W. and Plummer, E.W. (1998). ”Charge Rearrangement in the GexPb1−x/Ge(111) Interface”, Applied Surface Science, pp 457-463.
  9. Kim, J.Y., Lee, Y.E., Cho, H.S., Lee, D.H. and Kim, Y.J. (1995). ”Electrical Properties of Al-doped ZnO Transparent Conducting Thin Films Deposited by RF Magnetron Sputtering”, Korean Journal of Materials Research, pp 280-287.
  10. Ladebeck, J. and Regula, T. (1999). ”Fatty Methyl Ester Hydrogenation: Application of Chromium Free Catalysts”, Applied Surface Science, pp 215-220.
  11. Wang, P., Zhang, D., Kim, D.H., Qiu, Z., Gao, L., Murakami, R. and Song, X. (2009). ”Effect of Process Parameters on Electrical, Optical Properties of IZO Films Produced by Inclination Opposite Target Type DC Magnetron Sputtering”, J. App. Phys. 106, pp 103-104.
  12. Yasuhrio, I. and Hirokazu, K. (2001). ”Argon Gas Pressure Dependence of the Properties of Transparent Conducting ZnO : Al Films Deposited on Glass Substrates”, Applied Surface Science, pp 508-511.

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  1. Dependences of Sputtering Times on the Structural and Electrical Properties of ZnO/Ag/ZnO Thin Films on PET by DC Sputtering vol.12, pp.6, 2013, https://doi.org/10.1109/TNANO.2013.2274596