Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Synthesis of SiC Nano-powder from TEOS by RF Induction Thermal Plasma

RF 열플라즈마를 이용한 TEOS로 부터의 SiC 나노분말 합성

  • Ko, Sang-Min (Korea Institute of Ceramic Engineering and Technology) ;
  • Koo, Sang-Man (Department of Chemical Engineering, Hanyang University) ;
  • Kim, Jin-Ho (Korea Institute of Ceramic Engineering and Technology) ;
  • Kim, Ji-Ho (Korea Institute of Ceramic Engineering and Technology) ;
  • Byeon, Myeong-Seob (Korea Institute of Ceramic Engineering and Technology) ;
  • Hwang, Kwang-Taek (Korea Institute of Ceramic Engineering and Technology)
  • 고상민 (한국세라믹기술원 이천분원) ;
  • 구상만 (한양대학교 화학공학과) ;
  • 김진호 (한국세라믹기술원 이천분원) ;
  • 김지호 (한국세라믹기술원 이천분원) ;
  • 변명섭 (한국세라믹기술원 이천분원) ;
  • 황광택 (한국세라믹기술원 이천분원)
  • Received : 2010.05.12
  • Accepted : 2010.09.17
  • Published : 2011.01.31
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Abstract

Silicon carbide (SiC) has recently drawn an enormous industrial interest because of its useful mechanical properties such as thermal resistance, abrasion resistance and thermal conductivity at high temperature. RF Thermal plasma (PL-35 Induction Plasma, Tekna CO., Canada) has been utilized for synthesis of high purity SiC powder from cheap inorganic solution (Tetraethyl Orthosilicate, TEOS). It is found that the powders by thermal plasma consist of SiC with free carbon and amorphous silica ($SiO_2$) and, by thermal treatment and HF treatment, the impurities are driven off resulting high purity SiC nano-powder. The synthesized SiC powder lies below 30 nm and its properties such microstructure, phase composition, specific surface area and free carbon content have been characterized by X-ay diffraction (XRD), field emission scanning electron microscopy (FE-SEM), thermogravimetric (TG) and Brunauer-Emmett-Teller (BET).

Keywords

References

  1. A. Chrysanthou and P. Grieveson, “Formation of Silicon Carbide Whiskers and Their Microstructure,” J. Mat. Sct., 26 3463-76 (1991). https://doi.org/10.1007/BF00557132
  2. D.K. Kim, S. Park, K. Cho, and H.B. Lee, "Synthesis of SiC by Self-Propagating High Temperature Synthesis Chemical Furnace(in Korean)," J. Kor. Ceram. Soc., 31 [11] 1283-92 (1994).
  3. I.N. Kholmanov, A. Kharlamov, E. Barborini, C. Lenardi, A. Li Bassi, C.E. Bottani, C. Ducati, S. Maffi, N.V. Kirillova, P. Milani, and J. Nanosci, "A Simple Method for the Synthesis of Silicon Carbide Nanorods," J. Nanosci Nanotech, 2 [5] 453-56 (2002). https://doi.org/10.1166/jnn.2002.127
  4. T. Ishigaki, S.M. Oh, J.G. Li, and D.W. Park, "Controlling the Synthesis of TaC Nanopowders by Injecting Liquid Precursor Into RF Induction Plasma," Science and Technology of Advanced Materials, 6 111-18 (2005). https://doi.org/10.1016/j.stam.2004.11.001
  5. R. Ye, J.G. Li, and Ishigaki, "Controlled Synthesis of Alumina Nanoparticles Using Inductively Coupled Thermal Plasma with Enhanced Quenching," Thin Solid Films, 515 4251-57 (2007). https://doi.org/10.1016/j.tsf.2006.02.050
  6. Z. Karoly, J. Szepvolgyi, and Z. Farkas, "Simultaneous Calcination and Spheroidization of Gibbsite Powders in an RF Thermal Plasma," Powder Technology, 110 169-78 (2000). https://doi.org/10.1016/S0032-5910(99)00195-3
  7. S. M. Oh and D. W. Park, "Preparation of AlN Fine Powder by Thermal Plasma Processing," Thin Solid Films, 316 189-94 (1998). https://doi.org/10.1016/S0040-6090(98)00413-1
  8. I. S. Han, S. M. Oh, W. P. Tai, W. S. Ahn, C. M. Lee, J. H. Oh, and D. W. park, “Synthesis of Titanium Carbide Nanopowder using Thermal Plasma(in Korean),” J. Kor. Ind. Eng. Chem., 14 [8] 1028-32 (2003).
  9. J. H. Lee, W. J. Kim, and J. Lee, "Porous Silica Ceramics Prepared by Sol-gel Process-Effect of $H_2O/TEOS$ Molar Ratio(in Korean)," J. Kor. Ceram. Soc., 34 [2] 216-24 (1997).
  10. S. C. Lee and C. M. Lee, "Studies on the Properties of the Plasma TEOS $SiO_2$ Film(in Korean)," J. Kor. Ceram. Soc., 31 [2] 206-12 (1994).
  11. S. Y. Lee, "Synthesis of SiC-C Compound Using Oranic Precursor(in Korean)," Ceramist Kor. Ceram. Soc., 12 [2] 116-22 (1997).
  12. Y. C. Yang and Y. N. Chun, "Hydrogen Production for PEMFC Application in Plasma Reforming System(in Korean)", Kor. Chem. Eng. Res., 46 [5] 1002-7 (2008).