Korean Journal of Optics and Photonics (한국광학회지)

Optical Society of Korea (한국광학회)
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Fabrication of a Liquid Crystal Cell Using ITO-deposited Polarizers as Substrates

ITO 박막이 증착된 편광판을 기판으로 하는 액정 셀의 제작

  • Jin, Hye-Jung (School of Electrical Engineering, Pusan National University) ;
  • Kim, Ki-Han (School of Electrical Engineering, Pusan National University) ;
  • Park, Kyoung-Ho (School of Electrical Engineering, Pusan National University) ;
  • Son, Phil-Kook (Department of Advanced Materials Engineering for Information & Electronics, Kyung Hee University) ;
  • Kim, Jae-Chang (School of Electrical Engineering, Pusan National University) ;
  • Yoon, Tae-Hoon (School of Electrical Engineering, Pusan National University)
  • 진혜정 (부산대학교 전자전기공학부) ;
  • 김기한 (부산대학교 전자전기공학부) ;
  • 박경호 (부산대학교 전자전기공학부) ;
  • 손필국 (경희대학교 정보전자신소재공학과) ;
  • 김재창 (부산대학교 전자전기공학부) ;
  • 윤태훈 (부산대학교 전자전기공학부)
  • Received : 2010.12.21
  • Accepted : 2011.02.07
  • Published : 2011.04.25
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Abstract

We propose a super-thin and light-weight liquid crystal cell, in which glass substrates are eliminated and polarizers are used as substrates. We fabricate a polarizer substrate by depositing a-SiOX as a buffer layer, indium-tin-oxide as a transparent conducting layer, and a-SiOX as an alignment layer on a polarizer sequentially at a low temperature. We use the ion-beam method to align liquid crystals on polarizer substrates.

본 논문에서는 액정 디스플레이의 구현에 있어서 필수적인 필름인 편광판에 ITO를 증착하여 기존 액정 디스플레이에서 두께의 대부분을 차지하는 유리기판을 제거함으로써 경략 박형 액정 셀을 구현하였다. 저온($40^{\circ}C$)에서 편광판에 sputtering으로 buffer layer와 ITO를 증착하여 높은 투과율과 낮은 비저항 및 편평도를 확보하였다. 최종적으로 저온공정이 가능한 ion-beam 배향법을 이용하여 액정을 배향하고 액정 셀을 제작하고 전기광학특성을 확인하였다.

Keywords

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