Journal of the Korean institute of surface engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
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Numerical Modeling of Perturbation Effects of Electrostatic Probe into 2D ICP(inductively coupled plasma)

2D-ICP(inductively coupled plasma)에서 정전 탐침 삽입 시의 플라즈마 수치 계산

  • Joo, Jung-Hoon (Department of Materials Science and Engineering and Plasma Materials Research Center, Kunsan National University)
  • 주정훈 (군산대학교 공과대학 신소재공학과, 플라즈마 소재 응용 센터)
  • Received : 2011.02.21
  • Accepted : 2011.02.27
  • Published : 2011.02.28
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Abstract

Numerical modeling is used to investigate the perturbation of a single Langmuir probe (0.2 mm diameter shielded with 6 mm insulator) inserted along the center axis of a cylindrical inductively coupled plasma chamber filled with Ar at 10 mTorr and driven by 13 MHz. The probe was driven by a sine wave. When the probe tip is close to a substrate by 24.5 mm, the probe characteristics was unperturbed. At 10 mm above the substrate, the time averaged electric potential distribution around the tip was severly distorted making a normal probe analysis impossible.

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References

  1. ESI Corporation, CFD-ACE+Module Manual Part 2, 2010.
  2. 홍광기, 최지성, 양원균, 주정훈, 한국표면공학회 2010년도 추계학술대회, 인천 송도.
  3. 지식경제부 SystemIC 2010 사업 결과 발표회, 2009. 2. 26, 용평 리조트.
  4. K. Bera, S. Rauf, K. Collins, American Vacuum Society Symposium, 2010. PS2-TuA11, Albuquerque, NM, USA.
  5. Vladimir Kolobov, Robert Arslanbekov, Micro. Eng., 69 (2003) 606. https://doi.org/10.1016/S0167-9317(03)00352-6
  6. 이종철, 김윤제, 한국진공학회지, 17(3) (2008) 189.
  7. 주정훈, 한국진공학회지, 18(3) (2009) 164.
  8. 주정훈, 한국표면공학회지, 43(3) (2010) 154.
  9. A. Y. Kovalgin, A. Boogard, I. Brunets, J. Hollenman, J. Schmitz, Surf. Coat. Technol., 201 (2007) 8849. https://doi.org/10.1016/j.surfcoat.2007.04.086
  10. M. W. Kiehlbauch, D. B. Graves, J. Appl. Phys., 91 (2002) 3539. https://doi.org/10.1063/1.1452772
  11. M. Dickson, J. Hopwood, J. Vac. Sci. Technol. A, 15 (1997) 2307. https://doi.org/10.1116/1.580739