한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제28권3호
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  • Pages.383-388
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  • 2011
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  • 1225-9071(pISSN)
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  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

다개구 이온빔 가공장치용 냉음극 방식의 가스 이온원의 가능성 평가에 관한 연구

A Feasibility Study on the Cold Hollow Cathode Gas Ion Source for Multi-Aperture Focused Ion Beam System

  • 최성창 (송도테크노파크 나노표면기술실) ;
  • 강인철 (송도테크노파크 나노표면기술실) ;
  • 한재길 (송도테크노파크 나노표면기술실) ;
  • 김태곤 (연세대학교 기계공학부) ;
  • 민병권 (연세대학교 기계공학부)
  • 투고 : 2010.06.15
  • 심사 : 2010.12.16
  • 발행 : 2011.03.01
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초록

The cold hollow cathode gas ion source is under development for multi aperture focused ion beam (FIB) system. In this paper, we describe the cold hollow cathode ion source design and the general ion source performance using Ar gas. The glow discharge characteristics and the ion beam current density at various operation conditions are investigated. This ion source can generate maximum ion beam current density of approximately 120 mA/$cm^2$ at ion beam potential of 10 kV. In order to effectively transport the energetic ions generated from the ion source to the multi-aperture focused ion beam(FIB) system, the einzel lens system for ion beam focusing is designed and evaluated. The ions ejected from the ion source can be forced to move near parallel to the beam axis by adjusting the potentials of the einzel lenses.

키워드

참고문헌

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