Journal of the Korean Vacuum Society (한국진공학회지)

The Korean Vacuum Society (한국진공학회)
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Real Time Temperature Distribution Measurement of a Microheater by Using Off-Axis Digital Holography

Off-Axis 디지털홀로그래피를 이용한 마이크로히터의 실시간 온도분포측정

  • Tserendolgor, D. (Division of Mechanical System Engineering, Chonbuk National University) ;
  • Baek, Byung-Joon (Division of Mechanical System Engineering, Chonbuk National University) ;
  • Kim, Dae-Suk (Division of Mechanical System Engineering, Chonbuk National University)
  • 체랭돌가르 (전북대학교, 기계시스템공학부) ;
  • 백병준 (전북대학교, 기계시스템공학부) ;
  • 김대석 (전북대학교, 기계시스템공학부)
  • Received : 2011.02.14
  • Accepted : 2011.03.11
  • Published : 2011.03.30
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Abstract

We describe a single shot off-axis digital holography based on a Mach-Zehnder interferometic scheme for measuring temperature distribution of a microheater. The proposed scheme has the capability of reconstructing object phase image which is dependent of the temperature distribution in real time. Experimental results shows that there is a moderate linear relationship between the measured phase and temperature in the range of $20^{\circ}C$ to $60^{\circ}C$. We expect that the proposed system can provide a very reliable and fast solution in various surface temperature distribution measurement applications.

본 논문은 마이크로히터표면의 실시간 온도분표측정을 위한 마하젠더 간섭계 기반의 off-axis 디지털홀로그래피기술에 대한 것이다. 제안된 방법은 재료표면의 온도분포에 직접적인 함수인 2차원 위상 분포를 측정하고, 이를 통해 실시간으로 재료표면의 온도 map을 측정할 수 있다. 본 논문에서는 섭씨 20도에서 60도 사이의 온도구간에서 마이크로히터 표면의 위상변화와 실제표면온도가 선형적인 관계가 있음을 실험적으로 보였다. 제안된 방법은 재료표면의 온도분포를 실시간으로 측정하고자 하는 다양한 응용분야에 적용될 수 있을 것으로 기대된다.

Keywords

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