Korean Chemical Engineering Research

The Korean Institute of Chemical Engineers (한국화학공학회)
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Characteristics of Mo Thin Films Deposited by DC Magnetron Sputtering

DC 마그네트론 스퍼터링 방법에 의해 증착된 Mo 박막의 특성

  • Kong, Seon-Mi (Department of Chemical Engineering, Inha University) ;
  • Xiao, Yubin (Department of Chemical Engineering, Inha University) ;
  • Kim, Eun-Ho (Department of Chemical Engineering, Inha University) ;
  • Chung, Chee-Won (Department of Chemical Engineering, Inha University)
  • 공선미 (인하대학교 화학공학과) ;
  • 소우빈 (인하대학교 화학공학과) ;
  • 김은호 (인하대학교 화학공학과) ;
  • 정지원 (인하대학교 화학공학과)
  • Published : 2011.04.30
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Abstract

Mo thin films were deposited on soda lime glass at room temperature by using DC magnetron sputtering The electrical and structural properties of the films were investigated by varying DC power and gas pressure as the deposition parameter. As DC power increased, the deposition rate of Mo films was increased and the electrical resistivity was decreased. It was observable that the crystallinity of the films was improved with increasing DC power. As gas pressure decreased, the deposition rate and resistivity of the films were decreased, and long rectangular grains were densely formed. With increasing gas pressure, the grains were transformed to a round shape and the voids on the film surface were increased. It was confirmed that the electrical resistivity of Mo films was increased as the amount of oxygen combined with Mo atoms increased. It was also disclosed that the films have low resistivity as the degree of coupling of oxygen with Mo was reduced due to the enhancement of the crystallinity of the films.

DC 마그네트론 스퍼터링 방법을 이용하여 soda lime glass 위에 Mo 박막을 증착하였다. DC power와 증착 압력을 변화시키면서 상온에서 Mo 박막을 증착하였고 증착된 박막의 전기적 성질 및 구조적 성질을 조사하였다. DC power가 증가할수록 박막의 증착속도는 증가되었고 전기 저항도는 감소하였으며 박막의 결정성이 향상되는 것을 관찰할 수 있었다. 증착 압력이 감소할수록 박막의 증착속도와 전기 저항도가 감소하였으며 가늘고 긴 모양의 결정입자가 조밀하게 박막을 형성하였다. 압력이 증가함에 따라서 결정입자는 원형으로 변형되었으며 박막의 표면에 공극의 생성이 증가하였다. Mo 박막의 전기 저항도는 Mo 원자에 결합된 산소의 양이 많아질수록 증가하게 되고, 박막의 결정성이 높아지면 산소의 결합도가 감소하여 낮은 저항도를 갖게 되는 것을 확인하였다.

Keywords

References

  1. Kim, S. G., Lee, J. C., Yun, K. H., Kang, K. H., Park, L. J., Song, J. W. and Han, S. O., "Morphology and Electrical Properties of Mo Thin Films by DC sputtering," Spring Conference on Korea Solar Energy Society, 181-186(2001).
  2. Scofield, J. H., Duda, A., Albin, D., Ballard, B. L. and Predecki, P. K., "Sputtered Molybdenum Bilayer Back Contact for Copper Indium Diselenide-based Polycrystalline Thin-film Solar Cells," Thin Solid Films, 260, 26-31(1995). https://doi.org/10.1016/0040-6090(94)06462-8
  3. Al-thani, H. A., Hasoon, F. S., Young, M., Asher, S., Alleman, J. L., Al-jassim, M. M. and Williamson, D. L., "The Effect of Mo Back Contact on Na Out-Diffusion and Device Performance of Mo/Cu(In,Ga)$Se_{2}$/CdS/ZnO Solar Cells," Proc. of the 29th IEEE Photovoltaic Specialists Conference, 720-723(2002).
  4. Al-thani, H. A., Hasoon, F. S., Alleman, J. L., Al-jassim, M. M. and Williamson, D. L., "The Deposition and Characterization of Mo/$CuInGaSe_{2}$/CdS/ZnO Solar Cells," The Sharjah Solar Energy Conference, 720-723(2001).
  5. Bollero, A., Andres, M., Garcia, C., Abajo, J. and Gutierrez, M. T., "Morphological, Electrical and Optical Properties of Sputtered Mo Thin Films on Flexible Substrates," Phys. Status Solidi A, 206(3), 540-546(2009). https://doi.org/10.1002/pssa.200824405
  6. Scofield, J. H., Asher, S., Albin, D., Tuttle, J., Contreras, M., Niles, D., Reedy, R., Tennant, A. and Noufi, R., "Sodium Diffusion, Selenization, and Microstructural Effects Associated with Various Molybdenum Back Contact Layers for CIS-based Solar Cells," Proc. of the 24th IEEE Photovoltaic Specialists Conference, 164-167(1995).
  7. Suzuki, M. and Asai, K., "Characteristics of Sputter-Deposited Mo Films," J. Electrochem. Soc., 131(1), 185-189(1984). https://doi.org/10.1149/1.2115504
  8. HeinB, J. P., Handel, F., Meyer, T. and Wurz, R., "High Productive Deposited Mo Layers for Back Ohmic Contacts of Solar Cells," Plasma Process. Polym., 6, S29-S35(2009). https://doi.org/10.1002/ppap.200930203
  9. Zhang, L., He, Q., Jiang, W. L., Liu, F. F., Li, C. J. and Sun, Y., "Mo Back Contact for Flexible Polyimide Substrate Cu(In, Ga)$Se_{2}$ Thin-Film Solar Cells", Chin. Phys. Lett., 25(9), 3452-3454(2008). https://doi.org/10.1088/0256-307X/25/9/096
  10. Alleman, J. L., Althani, H., Noufi, R., Moutinho, H., Al-jassim, M. M. and Hasoon, F., "Dependence of the Characteristics of Mo Films on Sputter Conditions," NCPV Program Review Meeting 2000, 239-240(2000).
  11. Chuang, J. C., Tu, S. L. and Chen, M. C., "Sputter-deposited Mo and Reactively Sputter-deposited Mo-N Films as Barrier Layers Against cu Diffusion," Thin Solid Films, 346, 299-306(2009).
  12. Vink, T. J., Somers, M. A. J., Daams, J. L. C. and Dirks, A. G., "Stress, Strain, and Microstructure of Sputter-deposited Mo Thin Films," J. Appl. Phys., 70(8), 4301-4308(1991). https://doi.org/10.1063/1.349108

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