Korean Journal of Materials Research (한국재료학회지)

Materials Research Society of Korea (한국재료학회)
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Effect of Anatase TiO2 Doping Power on Electrical, Optical and Structural Properties of Multicomponent TiO2-Doped ITO Electrodes

아나타세 TiO2 도핑파워가 다성분계 TiO2-ITO 투명 전극의 전기적, 광학적, 구조적 특성에 미치는 효과

  • Lim, Jong-Wook (Department of Advanced Materials Engineering for Information and Electronics Kyung Hee University) ;
  • Choi, Yoon-Young (Department of Advanced Materials Engineering for Information and Electronics Kyung Hee University) ;
  • Cho, Chung-Ki (Department of Advanced Materials Engineering for Information and Electronics Kyung Hee University) ;
  • Choi, Kwang-Hyuk (Department of Advanced Materials Engineering for Information and Electronics Kyung Hee University) ;
  • Kim, Han-Ki (Department of Advanced Materials Engineering for Information and Electronics Kyung Hee University)
  • 임종욱 (경희대학교 정보전자신소재공학과) ;
  • 최윤영 (경희대학교 정보전자신소재공학과) ;
  • 조충기 (경희대학교 정보전자신소재공학과) ;
  • 최광혁 (경희대학교 정보전자신소재공학과) ;
  • 김한기 (경희대학교 정보전자신소재공학과)
  • Published : 2011.07.27
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Abstract

We report on the effects of $TiO_2$ doping power on the characteristics of multicomponent $TiO_2$-ITO (TITO) electrodes prepared by a multi-target sputtering system with tilted cathode guns. Both as-deposited and annealed TITO electrodes showed linearly increased sheet resistance and resistivity with increasing $TiO_2$ doping power. However, the TITO electrodes exhibited a fairly high optical transmittance regardless of the $TiO_2$ doping power due to the high transparency of the $TiO_2$. Although the annealed TITO showed much lower sheet resistance and resistivity relative to the as-deposited samples, the electrical properties of the annealed samples exhibited similar dependence on the $TiO_2$ power to the as-deposited samples. In addition, it was found that doping of an anatase $TiO_2$ in the ITO electrode prevented the preferred (222) orientation of the TITO electrodes. Although the TITO electrode showed higher sheet resistance and resistivity than that of the pure ITO electrode, it offers a very smooth surface and usage of a low-cost Ti element. It is thus considered a promising multicomponent transparent conducting electrode for cost-efficient flat panel displays and photovoltatics.

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References

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