DOI QR코드

DOI QR Code

Fabrication of Silicon Nitride Ceramics by Gel-Casting and Microwave Gas Phase Reaction Sintering(II) : Microwave Nitridation of Silicon and Microwave Sintering of Silicon Nitride

Gel-Casting 및 마이크로파 기상반응소결에 의한 질화규소 세라믹 제조에 대한 연구(II) : 마이크로파에 의한 실리콘의 질화반응 및 질화규소의 소결

  • Bai, Kang (Energy Materials Research Center, Korea Institute of Energy Research) ;
  • Woo, Sang-Kuk (Energy Materials Research Center, Korea Institute of Energy Research) ;
  • Han, In-Sub (Energy Materials Research Center, Korea Institute of Energy Research) ;
  • Seo, Doo-Won (Energy Materials Research Center, Korea Institute of Energy Research)
  • 배강 (한국에너지기술연구원 에너지소재연구센터) ;
  • 우상국 (한국에너지기술연구원 에너지소재연구센터) ;
  • 한인섭 (한국에너지기술연구원 에너지소재연구센터) ;
  • 서두원 (한국에너지기술연구원 에너지소재연구센터)
  • Received : 2011.08.03
  • Accepted : 2011.08.31
  • Published : 2011.09.30

Abstract

Silicon nitride ceramics were prepared by microwave gas phase reaction sintering. By this method higher density specimens were obtained for short time and at low temperature, compared than ones by conventional pressureless sintering, even though sintering behaviors showed same trend, the relative density of sintered body inverse-exponentially increases with sintering temperature and/or holding time. And grain size of ${\beta}$-phase of the microwave sintered body is bigger than one of the conventional pressureless sintered one. Also they showed good bending strengths and thermal shock resistances.

Keywords

References

  1. K. H. Jack, "Prospects for Nitrogen Ceramics," Silicon Nitride, 93 345-50 (1994).
  2. F. F. Lange, "High-Temperature Strength Behavior of Hot Pressed $Si_3N_4$: Evidence for Subcritical Crack Growth," J. Am. Ceram. Soc., 57 [2] 84-87 (1974). https://doi.org/10.1111/j.1151-2916.1974.tb10819.x
  3. P. Drew and M. H. Lewis, "The Microstructure of Silicon Nitride Ceramics during Hot-Pressing Transformations," J. Mater. Sci., 9 [2] 261-69 (1974). https://doi.org/10.1007/BF00550950
  4. A. J. Moulson, "Reaction-Bonded Silicone Nitride: Its Formation and Properties," J. Mater. Sci., 14 [5] 1017-51 (1979). https://doi.org/10.1007/BF00561287
  5. J. S. Lee, J. H. Mun, B. D. Han, D. S. Park, and H. D. Kim, "Densification Behavior of Reaction-Bonded Silicon Nitride Preparded by Using Coarse Si Powder (in Korean)," J. Kor. Ceram. Soc., 39 [1] 45-50 (2002). https://doi.org/10.4191/KCERS.2002.39.1.045
  6. S. J. Hong, H. C. Ahn, and D. J. Kim, "Reaction Bonded $Si_3N_4$ from Si-Polysilazane Mixture (in Korean)," J. Kor. Ceram. Soc., 47 [6] 572-77 (2010). https://doi.org/10.4191/KCERS.2010.47.6.572
  7. T. N. Tiegs, J. O. Kiggans, and K. L. Ploetz, "Application of Microwave Heating for Fabrication of Silicon Nitride Ceramics," Ceram. Eng. Sci. Proc., 14 [9] 744-52 (1993). https://doi.org/10.1002/9780470314234.ch7
  8. M. C. L. Patterson, P. S. Apte, R. M. Kimber, and R. Roy, "Batch Process for Microwave Sintering of $Si_3N_4$," pp.291-300 in Microwave Processing of Materials 3, ed. by R. L. Beatty, W. H. Sutton and M. F. Iskander, Mater. Res. Soc. Symp. Proc., Pittsburg, Pennsylvania, 1992.
  9. M. C. L. Patterson, P. S. Apte, R. M. Kimber, and R. Roy, "Mechanical and Physical Properties of Microwave Sintered $Si_3N_4$," pp. 301-310 in Ref. 8.
  10. G. R. Terwillinger and F. F. Lange, "Pressureless Sintering of $Si_3N_4$," J. Am. Ceram. Soc., 71 [3] c144-c147 (1988).
  11. K. Bai and H. G. Km, "Microwave Sintering Behavior and Electrical Properties of $BaTiO_3$ Ceramics (in Korean)," J. Kor. Ceram. Soc., 35 [11] 1203-11 (1998).
  12. J. H. Brooske, R. F. Cooper, and I. Dopson, "Mechanisms for Nonthermal Effect on Ionic Mobility during Microwave Processing of Crystalline Solids," J. Mater. Sci., 7 [2] 495-501 (1992).