Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Synthesis of Silicon Carbide Nano-Powder from a Silicon-Organic Precursor by RF Inductive Thermal Plasma

RF 유도 열플라즈마를 이용한 유기 용매로 부터의 탄화규소 나노 분말 합성

  • Ko, Sang-Min (Korea Institute of Ceramic Engineering and Technology) ;
  • Koo, Sang-Man (Department of Chemical Engineering, Hanyang University) ;
  • Kim, Jin-Ho (Korea Institute of Ceramic Engineering and Technology) ;
  • Cho, Woo-Seok (Korea Institute of Ceramic Engineering and Technology) ;
  • Hwang, Kwang-Taek (Korea Institute of Ceramic Engineering and Technology)
  • 고상민 (한국세라믹기술원 이천분원) ;
  • 구상만 (한양대학교 화학공학과) ;
  • 김진호 (한국세라믹기술원 이천분원) ;
  • 조우석 (한국세라믹기술원 이천분원) ;
  • 황광택 (한국세라믹기술원 이천분원)
  • Received : 2012.07.05
  • Accepted : 2012.09.12
  • Published : 2012.11.30
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Abstract

Silicon carbide (SiC) has recently drawn an enormous amount of industrial interest due to its useful mechanical properties, such as its thermal resistance, abrasion resistance and thermal conductivity at high temperatures. In this study, RF thermal plasma (PL-35 Induction Plasma, Tekna CO., Canada) was utilized for the synthesis of high-purity SiC powder from an organic precursor (hexamethyldisilazane, vinyltrimethoxysilane). It was found that the SiC powders obtained by the RF thermal plasma treatment included free carbon and amorphous silica ($SiO_2$). The SiC powders were further purified by a thermal treatment and a HF treatment, resulting in high-purity SiC nano-powder. The particle diameter of the synthesized SiC powder was less than 30 nm. Detailed properties of the microstructure, phase composition, and free carbon content were characterized by X-ray diffraction (XRD), field emission scanning electron microscopy (FE-SEM), a thermogravimetric (TG) analysis, according to the and Brunauer-Emmett-Teller (BET) specific surface area from N2 isotherms at 77 K.

Keywords

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