Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
권호 표지
DOI QR코드

DOI QR Code

Effect of the Deposition Temperature on the Transmittance & Electrical Conductivity of In1.6Zn0.2Sn0.2O3-δ Thin Films Prepared by RF-magnetron Sputtering

RF-마그네트론 스퍼터링에 의해 제조된 In1.6Zn0.2Sn0.2O3-δ 박막의 투과율 및 전기 전도성에 미치는 증착 온도의 영향

  • Seo, Han (Electronic Materials Laboratory, Korea Institute of Ceramic Engineering & Technology) ;
  • Ji, Mi-Jung (Electronic Materials Laboratory, Korea Institute of Ceramic Engineering & Technology) ;
  • An, Yong-Tea (Electronic Materials Laboratory, Korea Institute of Ceramic Engineering & Technology) ;
  • Ju, Byeong-Kwon (Display and Nanosystem Laboratory, College of Engineering, Korea University) ;
  • Choi, Byung-Hyun (Electronic Materials Laboratory, Korea Institute of Ceramic Engineering & Technology)
  • Received : 2012.10.30
  • Accepted : 2012.11.15
  • Published : 2012.11.30
Download PDF
⟨ Previous Next ⟩

Abstract

In order to reduce the indium contents in transparent conducting oxide(TCO) thin films of $In_{1.6{\sim}1.8}Zn_{0.2}Sn_{0.2{\sim}0.4}O_3$ (IZTO), $In_{1.6}Zn_{0.2}Sn_{0.2}O_{3-{\delta}}$(IZTO) was prepared by replacing indium with Zn and Sn. The TCO films were deposited via RF-magnetron sputtering of the IZTO target at various deposition temperatures and its film characteristics were investigated. When deposited in an Ar atmosphere at $400^{\circ}C$, the electrical resistivity of the film decreased to $6.34{\times}10^{-4}{\Omega}{\cdot}cm$ and the optical transmittance was 80%. As the deposition temperature increased, the crystallinity of the IZTO film was enhanced. As a result, the electrical conductivity and transmittance properties were improved. This demonstrates the possibility of replacing ITO TCO film with IZTO.

Keywords

References

  1. C. W. Tang and S. A. Vanslyke, "Organic Electro Luminescent Diodes," Appl. Phys. Lett., 51 [12] 913-15 (1987). https://doi.org/10.1063/1.98799
  2. G. Li, C. W. Chu, V. Shrotriya, J. Huang, and Y. Yang, "Efficient Inverted Polymer Solar Cells," Appl. Phys. Lett., 88 [25] 253-503 (2006).
  3. J. M. Lee, B. H. Choi, M. J. Ji, Y. T. An, J. H. Park, J. H. Kwon, and B. K. Ju, "Effect of Barrier Layers on the Properties of Indium Tin Oxide Thin Films on Soda Lime Glass Substrates," Thin Solid Films, 517 4074-77 (2009). https://doi.org/10.1016/j.tsf.2009.01.149
  4. T. Minami, "Substitution of Transparent Conducting Oxide Thinfilms for Indium Tin Oxide Transparent Electrode Applications," Thin Solid Films, 516 [7] 1314-21 (2008). https://doi.org/10.1016/j.tsf.2007.03.082
  5. A. J. Freeman, "Chemical and Thin-Film Strategies for New Transparent Conducting Oxides," MRS Bulls., 25 [8] 45-51 (2000). https://doi.org/10.1557/mrs2000.150
  6. M. S. Grover, P. A. Hersh, H. Q. Chiang, E. S. Kettenring, J. F. Wager, and D. A. Keszler, "Thin-film Transistors with Transparent Amorphous Zinc Indium Tin Oxide Channel Layer," J. Phys. D-Appl. Phys., 40 [5] 1335-38 (2007). https://doi.org/10.1088/0022-3727/40/5/004
  7. S. P. Harvey, "Subsolidus Phase Relationships in the $ZnO-In_2O_3-SnO_2$ System," J. Am. Ceram. Soc., 91 [11] 3683-89 (2008). https://doi.org/10.1111/j.1551-2916.2008.02686.x
  8. K. H. Seo, D. H. Park, J. H. Lee, and J. J. Kim, "Co-doping Effect of $SnO_2$ and ZnO in $In_2O_3$ Ceramics: Change in Solubility Limit and Electrical Properties, Solid State Ionics," 177 [5] 601-5 (2006). https://doi.org/10.1016/j.ssi.2005.12.020
  9. N. Ogawa, K. Kuma, J. Uema, K. Yamamoto, R. Yoshimura, and D. Mori, "High Density ITO Sintered Body, ITO Target and Method of Manufacture," Korea Patent 10-0205556, 1999.
  10. S. Seki, M. Ogawa, Y. Sawada, "Indium-Tin-Oxide Thin Films Prepared by Dip Coating; Dependance of Resistivity on Film Thickness and Annealing Atmosphere(in Jpn)," J. Appl. Phys., 40 L1244-L1246 (2001). https://doi.org/10.1143/JJAP.40.L1244
  11. V Sivaji Reddy, K Das, A Dhar, and S K Ray, "The Effect of Substrate Temperature on the Properties of ITO Thin Films for OLED Applications," Semicond. Sci. Technol. 21 [12] 1747-52 (2006). https://doi.org/10.1088/0268-1242/21/12/043
  12. M. Nisha, "Effect of Substrate Temperature on the Growth of ITO Thin Films," Appl. Surf. Sci., 252 [5] 1430-35 (2005). https://doi.org/10.1016/j.apsusc.2005.02.115
  13. Q. B. Ma, Z. Z. Ye, H. P. He, L. P. Zhu, W. C. Liu, Y. F. Yang, L. Gong, J. Y. Huang, Y. Z. Zhang, and B. H. Zhao, "Highly Near-infrared Reflecting and Transparent Conducting ZnO : Ga films : Substrate Temperate Effect," J. Phys. D: Appl. Phys., 41 055302 (2008) https://doi.org/10.1088/0022-3727/41/5/055302
  14. C. F. Klingshirn, "Semiconductor Optics," 1st Edition, Chapter 3, Springer, Berlin, 1995.
  15. I. Hamberg, C.G. Granqvist, K.F. Berggren, B.E. Sernelius, and L. Engstrom, "Band-gap Widening in Heavily Sn-doped $In_2O_3$," Phys. Rev. B, 30 [6] 3240-49 (1984). https://doi.org/10.1103/PhysRevB.30.3240
  16. R. E. Dietz, J. J. Hopfield, and D. G. Thomas, "Excitons and the Absorption Edge of ZnO," J. Appl. Phys., 32. 2282-86 (1961). https://doi.org/10.1063/1.1777060
  17. T, J, Vink, W. Walrave, J. L. C. Daams, P. C. Baarslag, and J. E. A. M. van den Meerakker, "On the Homogeneity of Sputter-deposited ITO Films Part I. Stress and Microstructure," Thin Solid Films, 266 [2] 145-51 (1995). https://doi.org/10.1016/0040-6090(95)06818-X
  18. Li-jian Meng, M.P. dos Santos, "Properties of Indium Tin Oxide Films Prepared by Rf Reactive Magnetron Sputtering at Different Substrate Temperature," Thin Solid Films, 322 [1-2] 56-62 (1998). https://doi.org/10.1016/S0040-6090(97)00939-5
  19. A. Suzuki, T. Matsyshita, N. Wada, Y. Sakamoto, M. Okuda, "Transparent Conducting Al-Doped ZnO Thin Films Prepared by Pulsed Laser Deposition(in Jpn)." J. Appl. Phys., 35 L56-L59 (1996). https://doi.org/10.1143/JJAP.35.L56
  20. Donald L. Smith, "Thin-Film Deposition (Principles & Practice)," pp. 159-161, McGraw-Hill, New York, 1995.

Cited by

  1. Stability Enhancement of IZOthin Film Transistor Using SU-8 Passivation Layer vol.52, pp.7, 2015, https://doi.org/10.5573/ieie.2015.52.7.033
  2. 진공열처리에 따른 IGZO 박막의 특성 변화 vol.27, pp.4, 2012, https://doi.org/10.12656/jksht.2014.27.4.175