Abstract
In this study, we introduce a dynamic process model as well as the design methodology of optimized fuzzy controller for its efficient application to vacuum production system to produce a semiconductor, solar module and display and so on. In a vacuum control field, PID control method is widely used from the viewpoint of simple structure and preferred performance. But, PID control method is very sensitive to the change of environment of control system as well as the change of control parameters. Therefore, it's difficult to get a preferred performance results from target system which has a complicated structure and lots of nonlinear factors. To solve such problem, we propose the design methodology of an optimized fuzzy PID controller through a following series of steps. First a dynamic characteristic of the target system is analyzed through a series of experiments. Second the process model is built up and its characteristic is compared with real process. Third, the optimized fuzzy PID controller is designed using genetic algorithms. Finally, the fuzzy controller is applied to target system and then its performance is compared with that of other conventional controllers(PID, PI, and Fuzzy PI controller). The performance of the proposed fuzzy controller is evaluated in terms of auto-tuned control parameters and output responses considered by ITAE index, overshoot, rise time and steady state time.