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Electromigration in Molten-phase Ge2Sb2Te5 and Effects of Doping on Atomic Migration Rate

  • Joo, Young-Chang (Department of Materials Science & Engineering, Seoul National University) ;
  • Yang, Tae-Youl (Department of Materials Science & Engineering, Seoul National University) ;
  • Cho, Ju-Young (Department of Materials Science & Engineering, Seoul National University) ;
  • Park, Yong-Jin (Department of Materials Science & Engineering, Seoul National University)
  • Received : 2011.12.27
  • Accepted : 2012.01.09
  • Published : 2012.01.31

Abstract

Electromigration in molten $Ge_2Sb_2Te_5$ (GST) was characterized using pulsed DC stress to an isolated line structure. When an electrical pulse was applied to the GST, GST lines were melted by Joule heating, and Ge and Sb atoms migrate to the cathode, whereas Te atoms migrate to the anode. This elemental separation in the molten GST was caused by an electrostatic force-induced electromigration. The effects of O-, N-, and Bi-doping on the electromigration were also investigated, and atomic mobility changes by the doping were investigated by quantifying $DZ^*$ values. The Bi -doping did not affect the $DZ^*$ values of the constituent atoms in the molten GST, but the D$DZ^*$ values decreased by O-doping and N-doping.

Keywords

References

  1. W. Welnic, "Unraveling the Interplay of Local Structure and Physical Properties in Phase-change Materials," Nature Mater., 5 56-62 (2006). https://doi.org/10.1038/nmat1539
  2. I.-M. Park, J.-K. Jung, S.-O. Ryu, K.-J. Choi, B.-G. Yu, Y.-B. Park, S. M. Han, and Y.-C. Park, "Thermomechanical Properties and Mechanical Stresses of $Ge_2Sb_2Te_5$ Films in Phase-change Random Access Memory," Thin Solid Films, 517 848-52 (2008). https://doi.org/10.1016/j.tsf.2008.08.194
  3. A. Pirovano, A. Lacaita, A. Benvenuti, F. Pellizzer, and R. Bez, "Electronic Switching in Phase-change Memories," IEEE Trans. Electron Devices, 51 452-59 (2004). https://doi.org/10.1109/TED.2003.823243
  4. I. Friedrich, V. Weidenhof, W. Njoroge, P. Franz, and M. Wuttig, 'Structural Transformations of $Ge_2Sb_2Te_5$ Films Studied by Electrical Resistance Measurements," J. Appl. Phys., 87 4130-34 (2000). https://doi.org/10.1063/1.373041
  5. N. Yamada and T. Matsunaga, "Structure of Laser-crystallized $Ge_2Sb_{2+x}Te_5$ Sputtered Thin Films for Use in Optical Memory," J. Appl. Phys., 88 7020-28 (2000). https://doi.org/10.1063/1.1314323
  6. K. Shportko, S. Kremers, M. Woda, D. Lencer, J. Robertson, and M. Wuttig, "Resonant Bonding in Crystalline Phase-change Materials," Nature Mater., 7 653-58 (2008). https://doi.org/10.1038/nmat2226
  7. K. Kim and S. J. Ahn, "Reliability Investigations for Manufacturable High Density PRAM," IEEE Reliability Physics Symposium Proceedings, 157-62 (2005).
  8. S. O. Ryu, S. M. Yoon, K. J. Choi, N. Y. Lee, Y. S. Park, S. Y. Lee, B. G. Yu, J. B. Park, and W. C. Shin, "Crystallization Behavior and Physical Properties of Sb-Excess $Ge_2Sb_2Te_5$Thin Films for Phase Change Memory (PCM) Devices," J. Electrochem. Soc., 153 G234-37 (2006). https://doi.org/10.1149/1.2164768
  9. S.-W. Nam, D. Lee, M.-H. Kwon, D. Kang, C. Kim, T.-Y. Lee, S. Heo, Y.-W. Park, K. Lim, H.-S. Lee, J.-S. Wi, K.-W. Yi, Y. Khang, and K.-B. Kim, "Electric-field-induced Mass Movement of $Ge_2Sb_2Te_5$ in Bottleneck Geometry Line Structures," Electrochem. Solid-State Lett., 12 H155-59 (2009). https://doi.org/10.1149/1.3079480
  10. T.-Y. Yang, I.-M. Park, B.-J. Kim, and Y.-C. Joo, "Atomic Migration in Molten and Crystalline $Ge_2Sb_2Te_5$ under High Electric Field," Appl. Phys. Lett., 95 032104 (2009). https://doi.org/10.1063/1.3184584
  11. Y. Kim, K. Jeong, M. -H. Cho, U. Hwang, H. S. Jeong, and K. Kim, "Changes in the Electronic Structures and Optical Band Gap of $Ge_2Sb_2Te_5$ and N-doped $Ge_2Sb_2Te_5$ during Phase Transition," Appl. Phys. Lett., 90 171920 (2007). https://doi.org/10.1063/1.2722203
  12. I.-M. Park, T.-Y. Yang, S. W. Jung, Y. K. Kim, H. Horii, and Y.-C. Joo, "Investigation of Crystallization Behaviors of Nitrogen-doped $Ge_2Sb_2Te_5$ Films by Hermomechanical Characteristics," Appl. Phys. Lett., 94 061904 (2009). https://doi.org/10.1063/1.3078820
  13. R. M. Shelby and S. Raoux, 'Crystallization Dynamics of Nitrogen-doped $Ge_2Sb_2Te_5$," J. Appl. Phys., 105 104902 (2009). https://doi.org/10.1063/1.3126501
  14. K. Wang, D. Wamwangi, S. Ziegler, C. Steimer, and M. Wuttig, "Influence of Bi Doping upon the Phase Change Characteristics of $Ge_2Sb_2Te_5$," J. Appl. Phys., 96 5557-62 (2004). https://doi.org/10.1063/1.1803612
  15. T.-Y. Yang, J.-Y. Cho, and Y.-C. Joo, "Inhibition of the Electrostatic Force-induced Atomic Migration in $Ge_2Sb_2Te_5$ by Nitrogen Doping," Electrochem. Solid-State Lett., 13 H321-23 (2010). https://doi.org/10.1149/1.3460295
  16. T.-Y. Yang, J.-Y. Cho, Y.-J. Park, and Y.-C. Joo, "Influence of Dopants on Atomic Migration and Void Formation in Molten $Ge_2Sb_2Te_5$ under High-amplitude Electrical-pulse," Acta Mater., Article in Press (2012).
  17. R. Pearson, "Absolute Electronegativity and Hardness: Application to Inorganic Chemistry," Inorg. Chem., 27 734-40 (1988). https://doi.org/10.1021/ic00277a030
  18. E. Cho, S. Han, D. Kim, H. Horii, and H. S. Nam, "Ab Initio Study on Influence of Dopants on Crystalline and Amorphous $Ge_2Sb_2Te_5$," J. Appl. Phys., 109 043705 (2011). https://doi.org/10.1063/1.3553851
  19. R. Kojima, S. Okabayashi, T. Kashihara, K. Horai, T. Matsunaga, E. Ohno, N. Yamada, and T. Ohta, "Nitrogen Doping Effect on Phase Change Optical Disks," Jap. J. Appl. Phys., Part 1: Regular Papers and Short Notes and Review Papers, 37 2098-103 (1998). https://doi.org/10.1143/JJAP.37.2098
  20. H. Kolpin, D. Music, G. Laptyeva, R. Ghadimi, F. Merget, S. Richter, R. Mykhaylonka, J. Mayer, and J. M. Schneider, "Influence of Si and N Additions on Structure and Phase Stability of $Ge_2Sb_2Te_5$ Thin Films," J. Physics Condensed Matter, 21 [43] 435501 (2009). https://doi.org/10.1088/0953-8984/21/43/435501
  21. T. H. Jeong, M. R. Kim, H. Seo, J. W. Park, and C. Yeon, "Crystal Structure and Microstructure of Nitrogen-doped $Ge_2Sb_2Te_5$ Thin Film," Jap. J. Appl. Phys., Part 1, 39 2775-79 (2000). https://doi.org/10.1143/JJAP.39.2775
  22. T. H. Jeong, H. Seo, K. Lee, S. M. Choi, S. J. Kim, and S. Y. Kim, "Study of Oxygen-doped GeSbTe Film and its Effect as an Interface Layer on the Recording Properties in the Blue Wavelength," Jap. J. Appl. Phys., Part 2, 40 1609-12 (2001). https://doi.org/10.1143/JJAP.40.1609

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