Transactions of the Society of Information Storage Systems (정보저장시스템학회논문집)

The Society of Information Storage Systems (정보저장시스템학회)
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Calibration of SAW Based Capacitive Sensor Using Lumped Component and High Precision Gap Measurement

집중 소자를 이용한 표면 탄성파 장치 기반의 용량 성 센서 보정 및 이를 이용한 초정밀 간극 측정

  • Received : 2012.03.20
  • Accepted : 2012.03.23
  • Published : 2012.03.25
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Abstract

SAW device is widely used as filters, sensors, actuators in various technologies. And capacitive sensor is tremendously used to measure pressure, gap, etc. The application of SAW device as signal conditioner of capacitive sensor reduces noise level and enables high precision measurement. The response increase of SAW based capacitive sensor is produced just before the two capacitive electrode contacts by the existence of parasitic resistance of capacitive electrode. In this paper, we analyze the effects of parasitic resistance and propose the calibrating method using lumped component and execute the high precision gap measurement using calibrated system. And xx nm resolution and yy ${\mu}m$ stroke was attained.

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Acknowledgement

Supported by : 한국 연구재단

References

  1. I.-T. Tang, H. -J. Chen , M.-P. Houng and Y.-H. Wang, 2003, "A novel integrable surface acoustic wave notch filter", Solid-State Electronics, Vol. 47, pp. 2063-2066 https://doi.org/10.1016/S0038-1101(03)00243-0
  2. K. Lange, B. E. Rapp and M. Rapp, 2008, "Surface acoustic wave biosensors", Anal Bioanal Chem., pp. 1509-1519
  3. J. Kondoh, S. Tabushi, Y. Matsui and S. Shiokawa, 2008, "Development of methanol sensor using a shear horizontal surface acoustic wave device for a direct methanol fuel cell", Sensors and Actuators B, Vol. 129, pp. 575-580 https://doi.org/10.1016/j.snb.2007.09.023
  4. M. Z. Atashbar, B. J. Bazuin, M. Simpeh and S. Krishnamurthy, 2004, "3-D Finite-Element Simulation Model of SAW Palladium Thin Film Hydrogen Sensor", IEEE International Ultrasonics, Ferroelectrics, and Frequency Control Joint 50th Anniversary Conference, pp. 549-553.
  5. W. Robbins and A. Hietala, 1988, "A simple phenomenological model of tunable SAW devices using magnetostrictive thin films," IEEE Trans. Ultrason. Ferroelect., Freq. Contr., vol. 35, pp. 718-722 https://doi.org/10.1109/58.9328
  6. L. Reindl, G. Scholl, T. Ostertag, H. Scherr, U. Wolff, and F. Schmidt, 1998, "Theory and application of passive SAW radio transponders as sensors," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., Vol. 45, pp. 1281-1292. https://doi.org/10.1109/58.726455
  7. R. Steindl, C. Hausleitner, A. Pohl, H. Hauser, and J. Nicolics, 1999, "Giant magneto-impedance magnetic field sensor with surface acoustic wave technology," in Proc. Eurosensors, Delft, The Netherlands
  8. J. Kim, T.-J. Lee, S.-C. Lim, N.-C. Park, Y.-P. Park and K.-S. Park, 2010, "Design of Capacitive Displacement Sensor and Gap Measurement with High Precision Using Surface Acoustic Wave Device," KSNVE, Vol. 20, No. 5, pp. 437-443. https://doi.org/10.5050/KSNVE.2010.20.5.437
  9. Colin K. Campbell, 1998, "Surface Acoustic Wave Devices for Mobile and Wireless Communications," Academic Press, San Diego.
  10. S.W. Jones, 2000, "Photolithography", IC Knowledge LLC
  11. D.M. Pozar, 2005, "Microwave Engineering," Wiley, New Jersey.
  12. S. C. Chapra and R. P. Canale, 2003, "Numerical Methods for Engineers", McGraw Hill, New-York.