Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Development of Diaphragm-type Stylus Probe for Ultra-precision On-machine Measurement Application

초정밀 기상측정용 다이아프램 타입 접촉식 프로브의 개발

  • Lee, Jung-Hoon (Center for Robot and Manufacturing Technology, Institute for Advanced Engineering) ;
  • Lee, Chan-Hee (Center for Robot and Manufacturing Technology, Institute for Advanced Engineering) ;
  • Choi, Joon-Myeong (Center for Robot and Manufacturing Technology, Institute for Advanced Engineering) ;
  • Kim, Ho-Sang (Center for Robot and Manufacturing Technology, Institute for Advanced Engineering)
  • 이정훈 (고등기술연구원 로봇/생산기술센터) ;
  • 이찬희 (고등기술연구원 로봇/생산기술센터) ;
  • 최준명 (고등기술연구원 로봇/생산기술센터) ;
  • 김호상 (고등기술연구원 로봇/생산기술센터)
  • Received : 2011.12.26
  • Accepted : 2012.05.10
  • Published : 2012.08.01
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Abstract

The diaphragm-type stylus probe was developed for ultra-precision on-machine measurement (OMM) application. This probe is equipped with two diaphragms which are parallel and one capacitive sensor is used for detecting the vertical motion of end tip in the stylus when it is contacted to the optical freeform surface. For better performance of proposed probes, several design parameters such as axial stiffness and the lateral deformations were investigated with finite element analysis techniques. To verify the feasibility, the profiles of the master sphere ball were measured on the ultra-precision milling machine. The measurement results show that the proposed probe can calculate the radius of the circle within the accuracy of 0.1 ${\mu}m$ for the ultraprecision optical surface.

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References

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