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Formation of Copper Seed Layers and Copper Via Filling with Various Additives

Copper Seed Layer 형성 및 도금 첨가제에 따른 Copper Via Filling

  • Lee, Hyun-Ju (School of Materials Science and Engineering, Pusan National University) ;
  • Ji, Chang-Wook (School of Materials Science and Engineering, Pusan National University) ;
  • Woo, Sung-Min (Education Program for Samsung Advanced Integrated Circuit, Pusan National University) ;
  • Choi, Man-Ho (Education Program for Samsung Advanced Integrated Circuit, Pusan National University) ;
  • Hwang, Yoon-Hwae (Department of Nanomaterials Engineering and BK 21 Nano Fusion Technology Division, Pusan National University) ;
  • Lee, Jae-Ho (Department of Materials Science and Engineering, Hongik University) ;
  • Kim, Yang-Do (School of Materials Science and Engineering, Pusan National University)
  • 이현주 (부산대학교 재료공학부) ;
  • 지창욱 (부산대학교 재료공학부) ;
  • 우성민 (부산대학교 차세대전자기판회로학과) ;
  • 최만호 (부산대학교 차세대전자기판회로학과) ;
  • 황윤회 (부산대학교 나노소재공학과) ;
  • 이재호 (홍익대학교 신소재공학과) ;
  • 김양도 (부산대학교 재료공학부)
  • Received : 2012.05.30
  • Accepted : 2012.06.18
  • Published : 2012.07.27

Abstract

Recently, the demand for the miniaturization of printed circuit boards has been increasing, as electronic devices have been sharply downsized. Conventional multi-layered PCBs are limited in terms their use with higher packaging densities. Therefore, a build-up process has been adopted as a new multi-layered PCB manufacturing process. In this process, via-holes are used to connect each conductive layer. After the connection of the interlayers created by electro copper plating, the via-holes are filled with a conductive paste. In this study, a desmear treatment, electroless plating and electroplating were carried out to investigate the optimum processing conditions for Cu via filling on a PCB. The desmear treatment involved swelling, etching, reduction, and an acid dip. A seed layer was formed on the via surface by electroless Cu plating. For Cu via filling, the electroplating of Cu from an acid sulfate bath containing typical additives such as PEG(polyethylene glycol), chloride ions, bis-(3-sodiumsulfopropyl disulfide) (SPS), and Janus Green B(JGB) was carried out. The desmear treatment clearly removes laser drilling residue and improves the surface roughness, which is necessary to ensure good adhesion of the Cu. A homogeneous and thick Cu seed layer was deposited on the samples after the desmear treatment. The 2,2'-Dipyridyl additive significantly improves the seed layer quality. SPS, PEG, and JGB additives are necessary to ensure defect-free bottom-up super filling.

Keywords

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