The Transactions of The Korean Institute of Electrical Engineers (전기학회논문지)

The Korean Institute of Electrical Engineers (대한전기학회)
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An Auto Metrology Sampling Method Considering Quality and Productivity for Semiconductor Manufacturing Process

반도체 제조공정에서 품질과 생산성을 고려한 자동 계측 샘플링 방법

  • 신명구 (성균관대학교 정보통신대학, 삼성전자) ;
  • 이지형 (성균관대학교 정보통신대학)
  • Received : 2012.06.07
  • Accepted : 2012.07.23
  • Published : 2012.09.01
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Abstract

This paper proposes an automatic measurement sampling method for the semiconductor manufacturing process. The method recommends sampling rates using information of process capability indexes and production scheduling plan within the restricted metrology capacity. In addition, it automatically controls the measurement WIP (Work In Process) using measurement priority values to minimize the measurement risks and optimize the measurement capacity. The proposed sampling method minimizes measurement controls in the semiconductor manufacturing process and improves the fabrication productivity via reducing measurement TAT (Turn Around Time), while guaranteeing the level of process quality.

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References

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