Journal of the Korean Crystal Growth and Crystal Technology (한국결정성장학회지)

The Korea Association of Crystal Growth (한국결정성장학회)
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Synthesis of transparent diamond-like carbon film on the glass by radio-frequency plasma enhanced chemical vapor deposition

RF-PECVD법에 의한 투명 다이아몬드상 탄소 박막 합성

  • Kim, Tae-Gyu (Department of Nanomechatronics Engineering, Pusan National University) ;
  • Shin, Yeong-Ho (Division of Advanced Nuclear Engineering, Pohang University of Science and Technology) ;
  • Cho, Hyun (Department of Nanomechatronics Engineering, Pusan National University) ;
  • Kim, Jin-Kon (Department of Nanomechatronics Engineering, Pusan National University)
  • 김태규 (부산대학교 나노메카트로닉스공학과) ;
  • 신영호 (포항공과대학 첨단원자력공학부) ;
  • 조현 (부산대학교 나노메카트로닉스공학과) ;
  • 김진곤 (부산대학교 나노메카트로닉스공학과)
  • Received : 2012.08.06
  • Accepted : 2012.08.10
  • Published : 2012.08.31
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Abstract

Transparent diamond-like carbon (DLC) films were synthesized on glass using radio frequency plasma enhanced chemical vapor deposition method from the gas mixture of $CH_4$, $SiH_4$ and Ar. The pressure, the rf-power, $CH_4/SiH_4/Ar$ ratio, and the deposition time were 0.1Torr, 100W, 20 : 1 : 1, and 20 min, respectively. The optical transmittances of DLC-deposited glass and uncoated glass were compared with each other in the visible light regions. The DLC-deposited glass showed transmittance of approximately 83 % and 95 % as compared to the uncoated glass for the wavelength of 380 nm and 500 nm, respectively. The hardness and roughness of DLC-coated glass have been measured by nanoindentation and AFM, respectively. The DLC-coated glass showed a little less or similar optical transmittance compared to the uncoated glass, while the hardness of DLC-coated glass was 2.5 times higher than that of the uncoated glass. The deposited DLC film had the very smooth surface and was thicker than 150 nm after deposition for 20 min.

RF-PECVD(radio frequency plasma enhanced chemical vapor deposition)법을 이용하여 $CH_4+SiH_4+Ar$ 혼합 가스로부터 유리 기판 위에 투명 다이아몬드상 카본(diamond-like carbon, DLC)을 합성하였다. 공정압력과 rf-파워, $CH_4/SiH_4/Ar$ 혼합비, 그리고 증착 시간은 각각 0.1 torr, 100W, 20 : 1 : 1, 20분이었다. DLC가 증착된 유리와 증착되지 않은 유리의 투과도를 가시광선 영역에서 비교하였고, DLC가 증착된 유리의 경도, 표면 조도와 두께를 nanoindenter와 AFM으로 측정하였다. DLC가 증착된 유리의 투과도는 증착되지 않은 유리와 비교할 때 380 nm 파장에서 약 83 %, 500 nm 이상의 파장에서는 95 % 이상 수준이었다. DLC가 증착된 유리의 경도는 증착되지 않은 유리의 약 2.5배이었다. 증착된 DLC 박막은 매우 고른 표면을 보였으며 20분 증착 후 두께는 150 nm 이상으로 나타났다.

Keywords

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