ETRI Journal

  • 제34권5호
  • /
  • Pages.779-782
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  • 2012
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  • 1225-6463(pISSN)
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  • 2233-7326(eISSN)
한국전자통신연구원 (Electronics and Telecommunications Research Institute)
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Reactive Sputtering Process for $CuIn_{1-x}Ga_xSe_2$ Thin Film Solar Cells

  • Park, Nae-Man (Convergence Components & Materials Research Laboratory, ETRI) ;
  • Lee, Ho Sub (Convergence Components & Materials Research Laboratory, ETRI) ;
  • Kim, Jeha (Convergence Components & Materials Research Laboratory, ETRI, Research Institute of Photovoltaics, Cheongju University)
  • 투고 : 2012.02.09
  • 심사 : 2012.07.09
  • 발행 : 2012.10.31
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초록

$CuIn_{1-x}Ga_xSe_2$ (CIGS) thin films are grown on Mo/soda lime glass using a reactive sputtering process in which a Se cracker is used to deliver reactive Se molecules. The Cu and $(In_{0.7}Ga_{0.3})_2Se_3$ targets are simultaneously sputtered under the delivery of reactive Se. The effects of Se flux on film composition are investigated. The Cu/(In+Ga) composition ratio increases as the Se flux increases at a plasma power of less than 30 W for the Cu target. The (112) crystal orientation becomes dominant, and crystal grain size is larger with Se flux. The power conversion efficiency of a solar cell fabricated using an 800-nm CIGS film is 8.5%.

키워드

참고문헌

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피인용 문헌

  1. Thin Metal Electrodes for Semitransparent Organic Photovoltaics vol.35, pp.4, 2012, https://doi.org/10.4218/etrij.13.1912.0025
  2. Growth and structural properties of reactively co-sputtered CIGS films and their solar cell applications vol.64, pp.3, 2012, https://doi.org/10.3938/jkps.64.465
  3. Na-Dependent Ultrafast Carrier Dynamics of CdS/Cu(In,Ga)Se2 Measured by Optical Pump-Terahertz Probe Spectroscopy vol.119, pp.35, 2012, https://doi.org/10.1021/acs.jpcc.5b02282
  4. Flower like Buffer Layer to Improve Efficiency of Submicron-Thick CuIn1-xGaxSe2 Solar Cells vol.37, pp.6, 2012, https://doi.org/10.4218/etrij.15.0115.0114