Journal of the Korean Crystal Growth and Crystal Technology (한국결정성장학회지)

The Korea Association of Crystal Growth (한국결정성장학회)
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Synthesis of nano-sized Ga2O3 powders by polymerized complex method

착체중합법을 이용한 Ga2O3 나노 분말의 합성

  • Jung, Jong-Yeol (Icheon Branch, Korea Institute of Ceramic Engineering and Technology) ;
  • Kim, Sang-Hun (Icheon Branch, Korea Institute of Ceramic Engineering and Technology) ;
  • Kang, Eun-Tae (School of Nano and Advanced Materials Engineering, Gyeongsang National University) ;
  • Han, Kyu-Sung (Icheon Branch, Korea Institute of Ceramic Engineering and Technology) ;
  • Kim, Jin-Ho (Icheon Branch, Korea Institute of Ceramic Engineering and Technology) ;
  • Hwang, Kwang-Teak (Icheon Branch, Korea Institute of Ceramic Engineering and Technology) ;
  • Cho, Woo-Seok (Icheon Branch, Korea Institute of Ceramic Engineering and Technology)
  • 정종열 (한국세라믹기술원 이천분원) ;
  • 김상훈 (한국세라믹기술원 이천분원) ;
  • 강은태 (국립경상대학교 공과대학 재료공학부 재료공학과) ;
  • 한규성 (한국세라믹기술원 이천분원) ;
  • 김진호 (한국세라믹기술원 이천분원) ;
  • 황광택 (한국세라믹기술원 이천분원) ;
  • 조우석 (한국세라믹기술원 이천분원)
  • Received : 2013.10.02
  • Accepted : 2013.11.15
  • Published : 2013.12.31
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Abstract

In this study, we report the synthesis and characteristics of gallium oxide ($Ga_2O_3$) nanoparticles prepared by the polymerized complex method. $Ga_2O_3$ nanoparticles were synthesized using $Ga(NO_3)_3$, ethylene glycol, and citric acid as the starting materials at a low temperature of $500{\sim}800^{\circ}C$. The temperature of the weight reduction by the loss of organic precursor was revealed using TG-DTA analysis. The crystal structural change of $Ga_2O_3$ nanoparticles by the annealing process was investigated by XRD analysis. The morphologies and the size distributions of $Ga_2O_3$ nanoparticles were analyzed using SEM.

본 연구에서는 InGaZnO 산화물 반도체를 제조하기 위한 출발물질 중 하나인 $Ga_2O_3$ 분말을 착체중합법을 이용하여 합성하였다. 함께 사용되는 다른 출발 물질인 $In_2O_3$와 ZnO 분말 입자가 수십 nm 크기로 제조되는 반면 $Ga_2O_3$ 분말입자는 아직까지 수 ${\mu}m$ 크기의 입자가 사용되기 때문에 입도의 균일성을 확보하기 위해 착체중합법의 공정을 최적화하여 $Ga_2O_3$ 나노 분말을 합성하고 그 물성을 분석하였다. $Ga_2O_3$ 나노 분말 합성의 출발물질로 ethylene glycol, citric acid, $Ga(NO_3)_3$를 사용하였으며 $500{\sim}800^{\circ}C$에서 $Ga_2O_3$ 나노 입자을 합성하였다. TG-DTA 분석을 통해 전구체에서 유기물이 소실되는 온도를 확인하였고, XRD 분석을 통해 $Ga(NO_3)_3$ 농도 및 열처리 온도에 따른 $Ga_2O_3$ 나노 입자의 결정성을 확인하였다. SEM 분석을 이용하여 $Ga_2O_3$ 나노 입자의 미세 구조 및 입도 분포를 확인하였다.

Keywords

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