Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Fiber-Optic Pressure Sensor Using a Rugate-Structured Porous Silicon Diaphragm Coated with PMMA

PMMA가 코팅된 주름 구조를 갖는 다공성규소 격판을 이용한 광섬유 압력센서

  • Lee, Ki-Won (Department of Physics, Kongju National University) ;
  • Cho, So-Yeon (Department of Physics, Kongju National University)
  • Received : 2013.05.06
  • Accepted : 2013.05.23
  • Published : 2013.05.31
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Abstract

In this research, fiber-optic pressure sensors were fabricated with rugate-structured porous silicon (RPS) diaphragms coated with PMMA (Polymethyl-Methacrylate). The reflectance spectrum of the PMMA/RPS diaphragm was almost the same as that of uncoated RPS diaphragm. However the mechanical strength of the PMMA/RPS diaphragm increased more than that of the uncoated diaphragm. As a result, the fiber-optic sensor fabricated with PMMA/RPS diaphragm could successfully detect more high pressure difference without diaphragm damage than the highest detectable pressure difference of the sensor with normal RPS diaphragm. The response data of the fiber-optic sensor recorded as a function of pressure difference were fitted by theoretical curves. During this process, elastic moduli of the used PMMA/RPS diaphragms were obtained numerically. The dynamic response properties of the fiber-optic sensor were also investigated under continuous variation of the pressure difference conditions.

Keywords

Acknowledgement

Supported by : 한국연구재단

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