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Carbon Nanotube Synthesis with High Purity by Introducing of NH3 Etching Gas

암모니아 식각 가스 도입에 의한 고순도 탄소나노튜브의 합성

  • Lee, Sunwoo (Dept. of Electrical Information, Inha Technical College) ;
  • Lee, Boong-Joo (Dept. of Electrical Engineering, Namseoul University)
  • 이선우 (인하공업전문대학 전기정보과) ;
  • 이붕주 (남서울대학교 전자공학과)
  • Received : 2013.03.02
  • Accepted : 2013.05.07
  • Published : 2013.06.01

Abstract

Multi-walled carbon nanotubes were synthesized on Ni catalyst using thermal chemical vapor deposition. By introducing ammonia gas during the CNT synthesis process, clean and vertically aligned CNTs without impurities could be prepared. As the ammonia gas increased a partial pressure of hydrogen in the mixed gas during the CNT synthesis process, we could control the CNT synthesis rate appropriately. As the ammonia gas has an etching ability, amorphous carbon species covering the catalyst particles were effectively removed. Therefore catalyst particles could maintain their catalytic state actively during the synthesis process. Finally, we could obtain clean and vertically aligned CNTs by introducing $NH_3$ gas during the CNT synthesis process.

Keywords

References

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