Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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A Study on the Effect of the Sensor Gain Error in the Precision Measurement of Straightness Error Using Mixed Sequential Two-Probe Method

혼합축차이점법을 이용한 진직도 정밀측정에 있어서 센서 게인오차의 영향에 관한 연구

  • Jeong, Ji Hun (Department of Nano-Mechatronics, University of Science & Technology) ;
  • Oh, Jeong Seok (Advanced Manufacturing Systems Research Division, Korea Institute of Machinery & Materials) ;
  • Kihm, Gyungho (Advanced Manufacturing Systems Research Division, Korea Institute of Machinery & Materials) ;
  • Park, Chun Hong (Department of Nano-Mechatronics, University of Science & Technology)
  • 정지훈 (과학기술연합대학원대학교 나노메카트로닉스학과) ;
  • 오정석 (한국기계연구원 첨단생산장비연구본부) ;
  • 김경호 (한국기계연구원 첨단생산장비연구본부) ;
  • 박천홍 (과학기술연합대학원대학교 나노메카트로닉스학과)
  • Received : 2013.03.16
  • Accepted : 2013.05.12
  • Published : 2013.06.01
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Abstract

In this study, effect of the sensor gain error is theoretically analyzed and simulated when mixed sequential two-prove method(MTPM) is applied for the precision measurement of straightness error of a linear motion table. According to the theoretical analysis, difference of the gain errors between two displacement sensors increases measurement error dramatically and alignment error of the straightedge is also amplified by the sensor gain difference. On the other hand, if the gain errors of the two sensors are identical, most of error terms are cancelled out and the alignment error doesn't give any influence on the measurement error. Also the measurement error of the straightness error is minimized compared with that of the straightedge's form error owing to close relationship between straightness error and angular motion error of the table in the error terms.

Keywords

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