Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Surface Polishing of Polymer Microlens with Solvent Vapor

솔벤트 증기를 이용한 폴리머 마이크로 렌즈의 표면 연마

  • Kim, Sin Hyeong (Department of Mechanical System Design Engineering, Seoul Natl. Univ. of Sci. & Tech.) ;
  • Song, Jun Yeob (Department of Mechanical System Design Engineering, Seoul Natl. Univ. of Sci. & Tech.) ;
  • Lee, Pyeong An (Department of Mechanical Engineering, Soongsil University) ;
  • Kim, Bo Hyun (Department of Mechanical Engineering, Soongsil University) ;
  • Oh, Young Tak (Department of Mechanical Engineering, Shin Ansan University) ;
  • Cho, Young Hak (Department of Mechanical System Design Engineering, Seoul Natl. Univ. of Sci. & Tech.)
  • 김신형 (서울과학기술대학교 기계시스템디자인공학과) ;
  • 송준엽 (서울과학기술대학교 기계시스템디자인공학과) ;
  • 이평안 (숭실대학교 기계공학과) ;
  • 김보현 (숭실대학교 기계공학과) ;
  • 오영탁 (신안산대학교 기계과) ;
  • 조영학 (서울과학기술대학교 기계시스템디자인공학과)
  • Received : 2013.01.23
  • Accepted : 2013.05.08
  • Published : 2013.06.01
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Abstract

Today, there are lots of progresses in the field of lens researches, especially in the microlens fabrication. Unlike normal lenses, microlens has been widely used as a role of improving the performance of photonic devices which increase the optical precision, and also used in the fields of the display. In this paper, polymer microlenses with $300{\mu}m$ diameter were replicated through hot-embossing from nickel mold which was fabricated by micro-EDM. After hot-embossing process, the polymer microlenses have a rough surface due to the crater formed by micro-EDM process, which is projected onto the surface of the lenses. The surface of polymer microlenses was polished using solvent vapor to improve the surface roughness of the microlenses without changing their shape. In the experiment, the surface roughness was improved with the processing time and vapor temperature. Also, the roughness improvement was greatly affected by the solubility difference between polymer and solvent.

Keywords

References

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Cited by

  1. Fabrication and Characterization of Polymer Microlens using Solvent-vapor-assisted Reflow vol.32, pp.3, 2015, https://doi.org/10.7736/KSPE.2015.32.3.299