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원통형 방전소자의 방전특성 연구

Numerical Study on the Discharge Characteristics of Cylindrical Discharge Devices

  • 서정현 (인천대학교 전자공학과) ;
  • 신범재 (세종대학교 전자공학과)
  • Seo, Jeong-Hyun (Dept. of electronics engineering, Incheon national university) ;
  • Shin, Bhum-Jae (Dept. of electronics engineering, Sejong university)
  • 투고 : 2013.02.21
  • 심사 : 2013.06.10
  • 발행 : 2013.07.01

초록

In this paper, the discharge characteristics of ac-type cylindrical discharge devices with diameters (D) in the $50{\sim}400{\mu}m$ range have been investigated numerically. The cylindrical devices have much lower breakdown voltages compared to the coplanar electrode structures. The breakdown voltage of the cylindrical structures increases with the decrease of diameters in $50{\sim}100{\mu}m$ range. In $100{\sim}200{\mu}m$ range, however, the breakdown voltage decreases slightly with the decrease of diameters. Also, as the diameter gets smaller, the electron heating efficiency is greatly improved.

키워드

참고문헌

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