Korean Journal of Optics and Photonics (한국광학회지)

Optical Society of Korea (한국광학회)
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Wide Field Imaging Analysis of Graphene

그래핀의 대면적 이미지 특성 분석

  • Kwon, Kanghyuk (MMS New Equipment Development Team, SAMSUNG TECHWIN) ;
  • Kim, Nayoung (MMS New Business Team, SAMSUNG TECHWIN) ;
  • Havener, Robin W. (Department of Applied and Engineering Physics, Cornell University) ;
  • Won, Donggwan (MMS New Business Team, SAMSUNG TECHWIN) ;
  • Cho, Seungmin (MMS New Business Team, SAMSUNG TECHWIN) ;
  • Park, Jiwoong (Department of Chemistry and Chemical Biology, Cornell University)
  • 권강혁 (삼성테크윈 MMS사업부 IMS 신장비개발팀) ;
  • 김나영 (삼성테크윈 MMS사업부 MMS 신규사업팀) ;
  • ;
  • 원동관 (삼성테크윈 MMS사업부 MMS 신규사업팀) ;
  • 조승민 (삼성테크윈 MMS사업부 MMS 신규사업팀) ;
  • 박지웅
  • Received : 2013.02.14
  • Accepted : 2013.05.08
  • Published : 2013.06.25
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Abstract

A Raman spectrometer is essential for analyzing the characteristics of graphene. The commercial micro-Raman spectrometer is useful for measuring small areas, but due to the small measuring area, it has limited use in industry, as a sampling measure. This paper suggests a Raman spectrometer able to get a large area image of graphene. By using this image, we can get information on defects and on the presence of graphene. Therefore, this equipment can be used for quality assessment for production of graphene.

라만 분광기는 그래핀의 특성을 분석하기 위한 필수적인 방법이다. 상용 마이크로 라만 분광기는 작은 면적에 대해 유용하게 사용되고 있으나 작은 면적 측정으로 인하여 산업적으로는 시료 측정 등에 제한적으로 사용되고 있다. 본 논문에서는 그래핀의 대면적 이미지 얻을 수 있는 라만 분광기에 대해 제안하였다. 이 이미지를 이용하여 그래핀의 유무 및 결함에 대한 정보를 빠르게 얻었다. 이를 이용하여, 실시간으로 그래핀에 대한 결함 유무, 층 수에 대한 균일도를 확인할 수 있으며, 양산 그래핀에 대한 품질 평가에 활용할 수 있을 것이다.

Keywords

References

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