Journal of the Microelectronics and Packaging Society (마이크로전자및패키징학회지)

The Korean Microelectronics and Packaging Society (한국마이크로전자및패키징학회)
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Shape Error and Its Compensation in the Fabrication of Microlens Array Using Photoresist Thermal Reflow Method

Photoresist thermal reflow 방법을 이용하여 제작한 마이크로렌즈 어레이의 형상 관련 오차 및 이에 대한 보정

  • Kim, Sin Hyeong (Department of Mechanical System Design Engineering, Seoul Natational University of Science & Technology) ;
  • Hong, Seok Kwan (Advanced Convergent R&D group, Korea Institute of Industrial Technology) ;
  • Lee, Kang Hee (School of Robot and Automation Engineering, Dongyang Mirae University) ;
  • Cho, Young Hak (Department of Mechanical System Design Engineering, Seoul Natational University of Science & Technology)
  • 김신형 (서울과학기술대학교 기계시스템디자인공학과) ;
  • 홍석관 (한국생산기술연구원 미래융합연구그룹) ;
  • 이강희 (동양미래대학교 로봇자동화공학부) ;
  • 조영학 (서울과학기술대학교 기계시스템디자인공학과)
  • Received : 2013.03.19
  • Accepted : 2013.04.09
  • Published : 2013.06.30
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Abstract

Microlens array as basic element of the optical system have been fabricated with various focal length (mainly with long focal length) depending on the purpose of application. In this paper, the microlens arrays were fabricated for observing fluorescent images within sol-gel. Though the fluorescent signal is very low, the microlens array can help obtaining clear images through extracting the fluorescent light from sol-gel. We fabricated microlens arrays with short focal length, which can extract the light using photoresist thermal reflow method. In the experiment, the diameter of microlens decreased after thermal reflow because the solvent within the photoresist was vaporized. Therefore, to compensate the shape error by this reduction, microlens diameter in photomask was altered and spin-coat recipe of photoresist were modified.

마이크로렌즈 어레이는 광학 시스템의 기본 부품으로, 사용 목적에 따라 초점거리가 다르게 제작되며, 대체로 긴 초점거리의 렌즈들이 많이 제작되고 있다. 본 논문에서는 졸겔(sol-gel) 내부에 들어있는 형광으로 염색된 물질을 관찰하기 위하여 마이크로렌즈 어레이를 제작하였다. 일반적으로 형광 현미경에서 관찰되는 형광 빛은 그 강도가 약하지만 마이크로렌즈를 이용할 경우 빛을 집중시켜 선명한 관찰이 가능하게 한다. 이를 실현시키기 위해 photoresist thermal reflow법을 사용하여 초점 거리가 짧은 마이크로렌즈를 제작하였으며, 렌즈의 형상 관련 오차를 측정하였다. 측정 오차에 기반을 둔 포토마스크 보정 및 스핀 코팅 조건을 조정하여 적합한 마이크로렌즈의 직경과 형상을 구현하였다.

Keywords

References

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