한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제30권10호
  • /
  • Pages.1009-1015
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  • 2013
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  • 1225-9071(pISSN)
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  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
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515 nm 피코초 레이저를 이용한 구리 어블레이션 공정의 최적 에너지밀도에 대한 이론적 분석

Theoretical Analysis on the Optimum Fluence for Copper Ablation with a 515 nm Picosecond Laser

  • 신동식 (한국기계연구원 광응용기계연구실) ;
  • 조용권 (한국기계연구원 광응용기계연구실) ;
  • 손현기 (한국기계연구원 광응용기계연구실)
  • Shin, Dongsig (Department of Laser & Electron-beam Application, KIMM) ;
  • Cho, Yongkwon (Department of Laser & Electron-beam Application, KIMM) ;
  • Sohn, Hyonkee (Department of Laser & Electron-beam Application, KIMM)
  • 투고 : 2013.06.05
  • 심사 : 2013.08.29
  • 발행 : 2013.10.01
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초록

Ultra-short laser pulses are effective, when high requirements concerning accuracy, surface roughness and heat affected zone are demanded for surface structuring. In particular, picosecond laser systems that are suited to be operated in industrial environments are of great interest for many practical applications. This paper focused on inducing optimum process parameters for higher volume ablation rate by analyzing a relationship between crater diameter and optical spot size. In detail, the dependency of the volume ablation rate, penetration depth and threshold fluence on the pulse duration 8 ps and wavelength of 515 nm was discussed. The experimental results showed that wavelength of 515 nm resulted in less threshold fluence ($0.075J/cm^2$) on copper than IR wavelength ($0.3J/cm^2$). As a result, it was possible that optimum fluence for higher volume ablation rate was achieved with $0.28J/cm^2$.

키워드

참고문헌

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