Journal of the Korean Society of Manufacturing Technology Engineers (한국생산제조학회지)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
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Robust Control of Two-axes Precise Stage Using LMI Optimization

LMI 최적화를 이용한 2축 정밀 스테이지의 강인제어

  • Kim, Yeung-Shik (Department of Mechatronics, Kumoh National Institute of Technology) ;
  • Park, Heung-Seok (Department of Mechatronics, Kumoh National Institute of Technology) ;
  • Kim, In-Soo (Department of Mechatronics, Kumoh National Institute of Technology)
  • Received : 2013.06.11
  • Accepted : 2013.09.04
  • Published : 2013.10.15
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Abstract

In this paper, a robust optimization approach is applied to the two-axes stage using a piezoelectric actuator for precise motion tracking. Robust control is based on LQG/LTR (linear quadratic Gaussian control with loop transfer recovery) control. Further, an LMI (linear matrix inequality) is used to find the optimal parameter in the loop transfer recovery step, instead of a trial and error method. A decoupler in the shape of FIR filter is added to reduce the coupling effect between the motions of the two axes, and hence, the feedback control loop is designed independently for each axis motion. The experimental result shows that the proposed control scheme can be applied effectively for motion control of the two-axes stage.

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References

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