Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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A Piezo-Driven Miniaturized XY Stage with Two Prismatic-Prismatic Joints Type Parallel Compliant Mechanism

2 개의 병진-병진 관절형 병렬 탄성 메커니즘을 갖는 압전구동 소형 XY 스테이지

  • Choi, Kee-Bong (Nano-Convergence Mechanical Systems Research Division, Korea Institute of Machinery and Materials) ;
  • Lee, Jae Jong (Nano-Convergence Mechanical Systems Research Division, Korea Institute of Machinery and Materials) ;
  • Kim, Gee Hong (Nano-Convergence Mechanical Systems Research Division, Korea Institute of Machinery and Materials) ;
  • Lim, Hyung Jun (Nano-Convergence Mechanical Systems Research Division, Korea Institute of Machinery and Materials)
  • 최기봉 (한국기계연구원 나노융합기계연구본부) ;
  • 이재종 (한국기계연구원 나노융합기계연구본부) ;
  • 김기홍 (한국기계연구원 나노융합기계연구본부) ;
  • 임형준 (한국기계연구원 나노융합기계연구본부)
  • Received : 2013.10.18
  • Accepted : 2013.11.20
  • Published : 2013.12.01
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Abstract

In this paper, a miniaturized stage with two prismatic-prismatic joints (2-PP) type parallel compliant mechanism driven by piezo actuators is proposed. This stage consists of two layers which are a motion guide layer and an actuation layer. The motion guide layer has 2-PP type parallel compliant mechanism to guide two translational motions, whereas the actuation layer has two leverage type amplification mechanisms and two piezo actuators to generate forces. Since the volume of the stage is too small to mount displacement sensors, the piezo actuators embedding strain gauge sensors are chosen. With the strain gauge-embedded piezo actuators, a semi-control is implemented, which results in hysteresis compensation of the stage. As the results, the operating range of $30{\mu}m$, the resolution of 20 nm, and the bandwidth of 400 Hz in each axis were obtained in the experiments.

Keywords

References

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