Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Performance Improvement of Peristaltic Micropump Using Various Actuating Signal

다양한 동작신호의 사용에 따른 연동형 마이크로 펌프의 성능 향상

  • Hong, Pyo-Hwan (Shool of Electronics Engineering, Kyungpook National University) ;
  • Jung, Dong-Geon (Shool of Electronics Engineering, Kyungpook National University) ;
  • Pyo, Dae-Seong (Shool of Electronics Engineering, Kyungpook National University) ;
  • Lee, Jong-Hyun (Shool of Electronics Engineering, Kyungpook National University) ;
  • Cho, Chan-Seob (Shool of Electrical Engineering, Kyungpook National University) ;
  • Kim, Bonghwan (Department of Electronics Engineering, Catholic University of Daegu)
  • 홍표환 (경북대학교 전자전기컴퓨터학부) ;
  • 정동건 (경북대학교 전자전기컴퓨터학부) ;
  • 표대승 (경북대학교 전자전기컴퓨터학부) ;
  • 이종현 (경북대학교 전자전기컴퓨터학부) ;
  • 조찬섭 (경북대학교 산업전자전기공학부) ;
  • 김봉환 (대구가톨릭대학교 전자공학과)
  • Received : 2013.08.14
  • Accepted : 2013.10.15
  • Published : 2013.11.29
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Abstract

This paper described the development of electrostatically driven peristaltic micropump. The proposed micropump consists of a flexible membrane and a single chamber which electrodes are inserted. The single chamber is divided into smaller cells by the electrodes. The fabricated micropump was operated with four electrodes in the membrane and a various phase sequencing actuation. We studied the changes in the flow rate corresponding to the actuating signal applied to the micropump under the zero hydraulic pressure difference between lnlet port and outlet port. The pump was operated from 60 to 130 V. Whereas the maximum flow rate in basic actuating signal is about 83 ${\mu}1/min$ at 15 Hz, the maximum flow rate in optimized actuating signal is about 114 ${\mu}l/min$ at 10 Hz.

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