Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Pyramid and Half-Sphere Type of Surface Texturing for Si-Solar Cell

실리콘 태양전지의 피라미드와 반구형 표면 조직화

  • Pyo, Dae-Seong (Shool of Electronics Engineering, Kyungpook National University) ;
  • Jo, Jun-Hwan (Shool of Electronics Engineering, Kyungpook National University) ;
  • Hong, Pyo-Hwan (Shool of Electronics Engineering, Kyungpook National University) ;
  • Lee, Jong-Hyun (Shool of Electronics Engineering, Kyungpook National University) ;
  • Kim, Bonghwan (Department of Electronics Engineering, Catholic University of Daegu) ;
  • Cho, Chan-Seob (Shool of Electrical Engineering, Kyungpook National University)
  • 표대승 (경북대학교 전자전기컴퓨터학부) ;
  • 조준환 (경북대학교 전자전기컴퓨터학부) ;
  • 홍표환 (경북대학교 전자전기컴퓨터학부) ;
  • 이종현 (경북대학교 전자전기컴퓨터학부) ;
  • 김봉환 (대구가톨릭대학교 전자공학과) ;
  • 조찬섭 (경북대학교 산업전자전기공학부)
  • Received : 2013.08.14
  • Accepted : 2013.10.15
  • Published : 2013.11.29
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Abstract

In this paper, we found surface shapes are affected by several parameters of RIE, such as RF power, pressure, temp, and process times. The reflectance of pyramid and half sphere structures show differences among shapes, size, height, and depth of those structures. We made about $1{\mu}m$ pyramid and half sphere shapes of silicon surface with RIE. For comparing the reflectance, pyramid and half sphere structures are fabricated with same height. Pyramid structure cell shows higher cell efficiency of 12.5% by 1.1% than one of half sphere structure of 11.4%. The light absorption is more increased through the pyramid structure than half sphere structure.

Keywords

References

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