한국생산제조학회지 (Journal of the Korean Society of Manufacturing Technology Engineers)

  • 제23권6호
  • /
  • Pages.636-641
  • /
  • 2014
  • /
  • 2508-5093(pISSN)
  • /
  • 2508-5107(eISSN)
한국생산제조학회 (The Korean Society of Manufacturing Technology Engineers)
권호 표지
DOI QR코드

DOI QR Code

마이크로 렌즈 디스크와 핀홀 디스크를 이용한 고속 공초점용 닙코 디스크 개발

Development of Nipkow Disk for High-Speed Confocal Probe Using Micro-lens and Pinhole Disks

  • Kim, Gee Hong (Nano-Mechanical Systems Research Division, Korea Institute of Machinery and Materials) ;
  • Lee, Hyung Seok (NanoSystem Co. LTD.) ;
  • Kim, Chang Kyu (NanoSystem Co. LTD.) ;
  • Lim, Hyung Jun (Nano-Mechanical Systems Research Division, Korea Institute of Machinery and Materials) ;
  • Lee, Jae Jong (Nano-Mechanical Systems Research Division, Korea Institute of Machinery and Materials) ;
  • Choi, Kee Bong (Nano-Mechanical Systems Research Division, Korea Institute of Machinery and Materials)
  • 투고 : 2014.09.12
  • 심사 : 2014.11.25
  • 발행 : 2014.12.15
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

This paper discusses the fabrication process for a Nipkow disk using micro-lens and pinhole disks. The confocal measuring system that uses the Nipkow disk has the advantage in measuring speed, because the Nipkow disk can simultaneously provide confocal images of all pixels in a CCD camera without requiring a lateral scanning unit. A micro-lens configuration, which focuses illumination on a pinhole, overcomes the low optical efficiency of the Nipkow disk system and allows its use in practical applications. This paper describes how to design the Nipkow disk in terms of numerical aperture, particularly for measuring the height of solder bumps in packaging application and for hybrid processes combining mechanical and semiconductor processes.

키워드

참고문헌

  1. Daly, D., 2001, Microlens Arrays, CRC Press, New York.
  2. Pawley, J. B., 2006, Handbook of Biological Confocal Microscopy 3rd Ed., Springer, Germany.
  3. Corle, T. R., Kino, G. S., 1996, Confocal Scanning Optical Microscopy and Related Imaging Systems, Academic Press, San Diego.
  4. Tanaami, T., Otsuki, S., Tomosada, N., Kosugi, Y. Shimizu, M., Ishida, H., 2002, High-speed 1-frame/ms scanning confocal microscope with a microlens and Nipkow disks, Appl. Opt. 41:22 4704-4708. https://doi.org/10.1364/AO.41.004704
  5. Ishihara, M., Sasaki, H., 1999, High-speed surface measurement using a nonscanning multiple-beam confocal microscope, Opt. Eng. 38:6 1035-1040. https://doi.org/10.1117/1.602155
  6. Tiziani, H. J., Achi, R., Kramer, R. N., Wiegers, L., 1996, Theoretical analysis of confocal microscopy with microlenses, Appl. Opt. 35:1 120-125. https://doi.org/10.1364/AO.35.000120
  7. Kim, G. H., Lim, H. J., Jeong, M. R., Lee, J. J., Choi, K. B., Lee, H. S., Do, L. M., Fabrication of Micro-Lens Array with Long Focal Length for Confocal Microscopy, J. KSMTE 20:4 472-477.
  8. Eisner, M., Lindlein, N., Schwider, J., 1998, Confocal microscopy with a refractive microlens-pinhole array, Opt. Lett. 23:10 748-749. https://doi.org/10.1364/OL.23.000748
  9. Ishihara, M., 1999, Three-dimensional shape measuring apparatus, US patent : 5946100.